Characterization of metallic multilayers for X-ray optics

Charles M Falco, J. M. Slaughter

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

X-ray reflectivity is a sensitive tool for characterizing interfaces in multilayers. Using an appropriate model, the low-angle θ-2θ spectra can be fit to yield the thickness and roughness of each layer. For Si/Mo, a model that includes an interlayer at the Mo on Si interface gives much better results than a simple bilayer model. Non-specular X-ray scattering measurements are particularly sensitive to roughness that is correlated from layer to layer because correlated roughness gives rise to reasonant scattering in particular non-specular directions. The non-specular behavior can be understood in terms of current theories of X-ray scattering from multilayers. Structural parameters, such as spatial frequencies of the correlated roughness and a coherence length for the correlations can be determined from these data. For the Si/Mo multilayers studied, spatial frequencies below 1/200 Å-1 are correlated throughout the multilayer.

Original languageEnglish (US)
Pages (from-to)3-7
Number of pages5
JournalJournal of Magnetism and Magnetic Materials
Volume126
Issue number1-3
DOIs
StatePublished - 1993

Fingerprint

X ray optics
geometrical optics
Multilayers
roughness
Surface roughness
X ray scattering
x rays
scattering
interlayers
Scattering
reflectance
X rays

ASJC Scopus subject areas

  • Condensed Matter Physics

Cite this

Characterization of metallic multilayers for X-ray optics. / Falco, Charles M; Slaughter, J. M.

In: Journal of Magnetism and Magnetic Materials, Vol. 126, No. 1-3, 1993, p. 3-7.

Research output: Contribution to journalArticle

@article{d670f5dcdaf84a2ca6daab7153ecc994,
title = "Characterization of metallic multilayers for X-ray optics",
abstract = "X-ray reflectivity is a sensitive tool for characterizing interfaces in multilayers. Using an appropriate model, the low-angle θ-2θ spectra can be fit to yield the thickness and roughness of each layer. For Si/Mo, a model that includes an interlayer at the Mo on Si interface gives much better results than a simple bilayer model. Non-specular X-ray scattering measurements are particularly sensitive to roughness that is correlated from layer to layer because correlated roughness gives rise to reasonant scattering in particular non-specular directions. The non-specular behavior can be understood in terms of current theories of X-ray scattering from multilayers. Structural parameters, such as spatial frequencies of the correlated roughness and a coherence length for the correlations can be determined from these data. For the Si/Mo multilayers studied, spatial frequencies below 1/200 {\AA}-1 are correlated throughout the multilayer.",
author = "Falco, {Charles M} and Slaughter, {J. M.}",
year = "1993",
doi = "10.1016/0304-8853(93)90529-B",
language = "English (US)",
volume = "126",
pages = "3--7",
journal = "Journal of Magnetism and Magnetic Materials",
issn = "0304-8853",
publisher = "Elsevier",
number = "1-3",

}

TY - JOUR

T1 - Characterization of metallic multilayers for X-ray optics

AU - Falco, Charles M

AU - Slaughter, J. M.

PY - 1993

Y1 - 1993

N2 - X-ray reflectivity is a sensitive tool for characterizing interfaces in multilayers. Using an appropriate model, the low-angle θ-2θ spectra can be fit to yield the thickness and roughness of each layer. For Si/Mo, a model that includes an interlayer at the Mo on Si interface gives much better results than a simple bilayer model. Non-specular X-ray scattering measurements are particularly sensitive to roughness that is correlated from layer to layer because correlated roughness gives rise to reasonant scattering in particular non-specular directions. The non-specular behavior can be understood in terms of current theories of X-ray scattering from multilayers. Structural parameters, such as spatial frequencies of the correlated roughness and a coherence length for the correlations can be determined from these data. For the Si/Mo multilayers studied, spatial frequencies below 1/200 Å-1 are correlated throughout the multilayer.

AB - X-ray reflectivity is a sensitive tool for characterizing interfaces in multilayers. Using an appropriate model, the low-angle θ-2θ spectra can be fit to yield the thickness and roughness of each layer. For Si/Mo, a model that includes an interlayer at the Mo on Si interface gives much better results than a simple bilayer model. Non-specular X-ray scattering measurements are particularly sensitive to roughness that is correlated from layer to layer because correlated roughness gives rise to reasonant scattering in particular non-specular directions. The non-specular behavior can be understood in terms of current theories of X-ray scattering from multilayers. Structural parameters, such as spatial frequencies of the correlated roughness and a coherence length for the correlations can be determined from these data. For the Si/Mo multilayers studied, spatial frequencies below 1/200 Å-1 are correlated throughout the multilayer.

UR - http://www.scopus.com/inward/record.url?scp=0027663928&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0027663928&partnerID=8YFLogxK

U2 - 10.1016/0304-8853(93)90529-B

DO - 10.1016/0304-8853(93)90529-B

M3 - Article

AN - SCOPUS:0027663928

VL - 126

SP - 3

EP - 7

JO - Journal of Magnetism and Magnetic Materials

JF - Journal of Magnetism and Magnetic Materials

SN - 0304-8853

IS - 1-3

ER -