Characterization of multilayers for extended ultraviolet optics

Félix E. Fernández, Charles M Falco, P. Dhez, A. Khandar-Shahabad, L. Névot, B. Pardo, J. Corno, B. Vidal

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

We describe an extensive characterization procedure developed to study multilayers for extended ultraviolet (XUV, 1 Å≲λ≲1000 Å) optics. We present results of this procedure applied to sputtered Si/W multilayers designed as normal-incidence XUV reflectors for ∼200 Å. Techniques used were low-angle x-ray diffraction, Bragg-Brentano and Seemann-Bohlin diffraction, wide-film Debye-Scherrer (Read) camera, Rutherford backscattering spectroscopy, and transmission electron microscopy. Reflectances at several incidence angles were measured with synchrotron radiation and found to agree very well with reflectance curves calculated without adjustable parameters. The information obtained from the different techniques forms a coherent picture of the structure of these materials.

Original languageEnglish (US)
Pages (from-to)880-882
Number of pages3
JournalApplied Physics Letters
Volume51
Issue number12
DOIs
StatePublished - 1987

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incidence
optics
reflectance
reflectors
backscattering
synchrotron radiation
x ray diffraction
cameras
transmission electron microscopy
curves
diffraction
spectroscopy

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Fernández, F. E., Falco, C. M., Dhez, P., Khandar-Shahabad, A., Névot, L., Pardo, B., ... Vidal, B. (1987). Characterization of multilayers for extended ultraviolet optics. Applied Physics Letters, 51(12), 880-882. https://doi.org/10.1063/1.98842

Characterization of multilayers for extended ultraviolet optics. / Fernández, Félix E.; Falco, Charles M; Dhez, P.; Khandar-Shahabad, A.; Névot, L.; Pardo, B.; Corno, J.; Vidal, B.

In: Applied Physics Letters, Vol. 51, No. 12, 1987, p. 880-882.

Research output: Contribution to journalArticle

Fernández, FE, Falco, CM, Dhez, P, Khandar-Shahabad, A, Névot, L, Pardo, B, Corno, J & Vidal, B 1987, 'Characterization of multilayers for extended ultraviolet optics', Applied Physics Letters, vol. 51, no. 12, pp. 880-882. https://doi.org/10.1063/1.98842
Fernández FE, Falco CM, Dhez P, Khandar-Shahabad A, Névot L, Pardo B et al. Characterization of multilayers for extended ultraviolet optics. Applied Physics Letters. 1987;51(12):880-882. https://doi.org/10.1063/1.98842
Fernández, Félix E. ; Falco, Charles M ; Dhez, P. ; Khandar-Shahabad, A. ; Névot, L. ; Pardo, B. ; Corno, J. ; Vidal, B. / Characterization of multilayers for extended ultraviolet optics. In: Applied Physics Letters. 1987 ; Vol. 51, No. 12. pp. 880-882.
@article{b9466e4412324038914aa74b88e26ec2,
title = "Characterization of multilayers for extended ultraviolet optics",
abstract = "We describe an extensive characterization procedure developed to study multilayers for extended ultraviolet (XUV, 1 {\AA}≲λ≲1000 {\AA}) optics. We present results of this procedure applied to sputtered Si/W multilayers designed as normal-incidence XUV reflectors for ∼200 {\AA}. Techniques used were low-angle x-ray diffraction, Bragg-Brentano and Seemann-Bohlin diffraction, wide-film Debye-Scherrer (Read) camera, Rutherford backscattering spectroscopy, and transmission electron microscopy. Reflectances at several incidence angles were measured with synchrotron radiation and found to agree very well with reflectance curves calculated without adjustable parameters. The information obtained from the different techniques forms a coherent picture of the structure of these materials.",
author = "Fern{\'a}ndez, {F{\'e}lix E.} and Falco, {Charles M} and P. Dhez and A. Khandar-Shahabad and L. N{\'e}vot and B. Pardo and J. Corno and B. Vidal",
year = "1987",
doi = "10.1063/1.98842",
language = "English (US)",
volume = "51",
pages = "880--882",
journal = "Applied Physics Letters",
issn = "0003-6951",
publisher = "American Institute of Physics Publising LLC",
number = "12",

}

TY - JOUR

T1 - Characterization of multilayers for extended ultraviolet optics

AU - Fernández, Félix E.

AU - Falco, Charles M

AU - Dhez, P.

AU - Khandar-Shahabad, A.

AU - Névot, L.

AU - Pardo, B.

AU - Corno, J.

AU - Vidal, B.

PY - 1987

Y1 - 1987

N2 - We describe an extensive characterization procedure developed to study multilayers for extended ultraviolet (XUV, 1 Å≲λ≲1000 Å) optics. We present results of this procedure applied to sputtered Si/W multilayers designed as normal-incidence XUV reflectors for ∼200 Å. Techniques used were low-angle x-ray diffraction, Bragg-Brentano and Seemann-Bohlin diffraction, wide-film Debye-Scherrer (Read) camera, Rutherford backscattering spectroscopy, and transmission electron microscopy. Reflectances at several incidence angles were measured with synchrotron radiation and found to agree very well with reflectance curves calculated without adjustable parameters. The information obtained from the different techniques forms a coherent picture of the structure of these materials.

AB - We describe an extensive characterization procedure developed to study multilayers for extended ultraviolet (XUV, 1 Å≲λ≲1000 Å) optics. We present results of this procedure applied to sputtered Si/W multilayers designed as normal-incidence XUV reflectors for ∼200 Å. Techniques used were low-angle x-ray diffraction, Bragg-Brentano and Seemann-Bohlin diffraction, wide-film Debye-Scherrer (Read) camera, Rutherford backscattering spectroscopy, and transmission electron microscopy. Reflectances at several incidence angles were measured with synchrotron radiation and found to agree very well with reflectance curves calculated without adjustable parameters. The information obtained from the different techniques forms a coherent picture of the structure of these materials.

UR - http://www.scopus.com/inward/record.url?scp=5844335359&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=5844335359&partnerID=8YFLogxK

U2 - 10.1063/1.98842

DO - 10.1063/1.98842

M3 - Article

VL - 51

SP - 880

EP - 882

JO - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

IS - 12

ER -