CHARACTERIZATION OF SOL-GEL DERIVED TANTALUM OXIDE FILMS.

L. A. Silverman, G. Teowee, D. R. Uhlmann

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Scopus citations
Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposia Proceedings
PublisherMaterials Research Soc
Pages725-730
Number of pages6
ISBN (Print)0931837391, 9780931837395
DOIs
StatePublished - 1986

Publication series

NameMaterials Research Society Symposia Proceedings
Volume73
ISSN (Print)0272-9172

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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    Silverman, L. A., Teowee, G., & Uhlmann, D. R. (1986). CHARACTERIZATION OF SOL-GEL DERIVED TANTALUM OXIDE FILMS. In Materials Research Society Symposia Proceedings (pp. 725-730). (Materials Research Society Symposia Proceedings; Vol. 73). Materials Research Soc. https://doi.org/10.1557/proc-73-725