Characterization of transient cavitation in gas sparged solutions exposed to megasonic field using cyclic voltammetry

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15 Citations (Scopus)

Abstract

The application of megasonic energy in semiconductor cleaning solutions has been shown to be very effective in improving the particle removal efficiency (PRE). There has been a significant interest in understanding the phenomena of cavitation and acoustic streaming, which are known to play an important role in particle removal during megasonic cleaning. In the present work, transient cavitation in acoustically (∼1 MHz frequency) irradiated aqueous solutions containing different dissolved gases (Ar, N 2 and CO 2) has been characterized with a 25 μm diameter microelectrode using high resolution cyclic voltammetry. Specifically, using ferricyanide as an electrochemical probe, current transients are obtained as a function of time. A simple mathematical analysis based on diffusion is used to correlate the collapse characteristics of a transient cavity to the magnitude of current peaks and the time scale of rise and fall in current.

Original languageEnglish (US)
Pages (from-to)91-97
Number of pages7
JournalMicroelectronic Engineering
Volume102
DOIs
StatePublished - Feb 2013

Fingerprint

cavitation flow
Cavitation
Cyclic voltammetry
Gases
cleaning
Cleaning
gases
Acoustic streaming
acoustic streaming
dissolved gases
applications of mathematics
Microelectrodes
Carbon Monoxide
Semiconductor materials
aqueous solutions
cavities
probes
high resolution
energy

Keywords

  • Acoustic streaming
  • Cyclic voltammetry
  • Dissolved gases
  • Megasonic energy
  • Microelectrode
  • Transient cavitation

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Surfaces, Coatings and Films
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics

Cite this

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title = "Characterization of transient cavitation in gas sparged solutions exposed to megasonic field using cyclic voltammetry",
abstract = "The application of megasonic energy in semiconductor cleaning solutions has been shown to be very effective in improving the particle removal efficiency (PRE). There has been a significant interest in understanding the phenomena of cavitation and acoustic streaming, which are known to play an important role in particle removal during megasonic cleaning. In the present work, transient cavitation in acoustically (∼1 MHz frequency) irradiated aqueous solutions containing different dissolved gases (Ar, N 2 and CO 2) has been characterized with a 25 μm diameter microelectrode using high resolution cyclic voltammetry. Specifically, using ferricyanide as an electrochemical probe, current transients are obtained as a function of time. A simple mathematical analysis based on diffusion is used to correlate the collapse characteristics of a transient cavity to the magnitude of current peaks and the time scale of rise and fall in current.",
keywords = "Acoustic streaming, Cyclic voltammetry, Dissolved gases, Megasonic energy, Microelectrode, Transient cavitation",
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AU - Raghavan, Srini

AU - Deymier, Pierre A

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N2 - The application of megasonic energy in semiconductor cleaning solutions has been shown to be very effective in improving the particle removal efficiency (PRE). There has been a significant interest in understanding the phenomena of cavitation and acoustic streaming, which are known to play an important role in particle removal during megasonic cleaning. In the present work, transient cavitation in acoustically (∼1 MHz frequency) irradiated aqueous solutions containing different dissolved gases (Ar, N 2 and CO 2) has been characterized with a 25 μm diameter microelectrode using high resolution cyclic voltammetry. Specifically, using ferricyanide as an electrochemical probe, current transients are obtained as a function of time. A simple mathematical analysis based on diffusion is used to correlate the collapse characteristics of a transient cavity to the magnitude of current peaks and the time scale of rise and fall in current.

AB - The application of megasonic energy in semiconductor cleaning solutions has been shown to be very effective in improving the particle removal efficiency (PRE). There has been a significant interest in understanding the phenomena of cavitation and acoustic streaming, which are known to play an important role in particle removal during megasonic cleaning. In the present work, transient cavitation in acoustically (∼1 MHz frequency) irradiated aqueous solutions containing different dissolved gases (Ar, N 2 and CO 2) has been characterized with a 25 μm diameter microelectrode using high resolution cyclic voltammetry. Specifically, using ferricyanide as an electrochemical probe, current transients are obtained as a function of time. A simple mathematical analysis based on diffusion is used to correlate the collapse characteristics of a transient cavity to the magnitude of current peaks and the time scale of rise and fall in current.

KW - Acoustic streaming

KW - Cyclic voltammetry

KW - Dissolved gases

KW - Megasonic energy

KW - Microelectrode

KW - Transient cavitation

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