Chromatic correction of high-performance solid immersion lens systems

Research output: Contribution to journalArticle

8 Scopus citations

Abstract

The chromatic dispersion of hyper-hemisphere solid immersion lens (SIL) systems is discussed. A simple correction mechanism using a diffractive optical element (DOE) is presented that improves the chromatic aberration by a factor of ten.

Original languageEnglish (US)
Pages (from-to)1777-1779
Number of pages3
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume38
Issue number3 B
DOIs
StatePublished - 1999

Keywords

  • Aplanatic lens
  • Chromatic aberration
  • Diffractive optical element
  • Optical data storage
  • Solid immersion lens

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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