Cleaning silicon nitride gratings with liquid immersion

Mark Robertson-Tessi, Robert J. Wild, Alexander D Cronin, Tim Savas

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

We demonstrate a method for cleaning sodium deposits off nanofabricated silicon nitride gratings using liquid immersion without damaging the grating. The possibility of cleaning a grating successfully depends on its physical parameters and the type of liquid to be used. We present calculations on surface tension interactions between a liquid and the bars of the grating, and derive the maximum grating-bar span that will survive immersion.

Original languageEnglish (US)
Pages (from-to)1409-1412
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume24
Issue number3
DOIs
StatePublished - May 2006

Fingerprint

Silicon nitride
silicon nitrides
cleaning
submerging
Cleaning
gratings
Sodium deposits
Liquids
liquids
Surface tension
interfacial tension
deposits
sodium
interactions

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Surfaces and Interfaces
  • Physics and Astronomy (miscellaneous)

Cite this

Cleaning silicon nitride gratings with liquid immersion. / Robertson-Tessi, Mark; Wild, Robert J.; Cronin, Alexander D; Savas, Tim.

In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 24, No. 3, 05.2006, p. 1409-1412.

Research output: Contribution to journalArticle

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