Cleaning silicon nitride gratings with liquid immersion

Mark Robertson-Tessi, Robert J. Wild, Alexander D. Cronin, Tim Savas

Research output: Contribution to journalArticle

2 Scopus citations

Abstract

We demonstrate a method for cleaning sodium deposits off nanofabricated silicon nitride gratings using liquid immersion without damaging the grating. The possibility of cleaning a grating successfully depends on its physical parameters and the type of liquid to be used. We present calculations on surface tension interactions between a liquid and the bars of the grating, and derive the maximum grating-bar span that will survive immersion.

Original languageEnglish (US)
Pages (from-to)1409-1412
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume24
Issue number3
DOIs
StatePublished - May 1 2006

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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