CMP active diamond characterization and conditioner wear

Leonard Borucki, Rumin Zhuang, Yun Zhuang, Ara Philipossian, Naoki Rikita

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Scopus citations

Abstract

Using a pad substitute material, we measure the number of active or working diamonds on a conditioner and find that it is generally a small fraction of the total number on the disc. The number of active diamonds also increases with the applied load and varies somewhat with sliding direction. However, even among the active diamonds, most do relatively little cutting. A few diamonds on a disc do most of the deep bulk cutting, a larger fraction skim the higher areas of the pad surface and most of the diamonds on the disc apparently merely help to support the load. While all of the diamonds that make contact, cutting or otherwise, may show evidence some of mechanical wear, wear of the small number of deep bulk cutting diamonds may be responsible for declining cut rates and for surprisingly low observed conditioner lifetimes.

Original languageEnglish (US)
Title of host publication2007 MRS Spring Meeting
Pages3-13
Number of pages11
StatePublished - Dec 1 2007
Event2007 MRS Spring Meeting - San Francisco, CA, United States
Duration: Apr 9 2007Apr 13 2007

Publication series

NameMaterials Research Society Symposium Proceedings
Volume991
ISSN (Print)0272-9172

Other

Other2007 MRS Spring Meeting
CountryUnited States
CitySan Francisco, CA
Period4/9/074/13/07

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ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Borucki, L., Zhuang, R., Zhuang, Y., Philipossian, A., & Rikita, N. (2007). CMP active diamond characterization and conditioner wear. In 2007 MRS Spring Meeting (pp. 3-13). (Materials Research Society Symposium Proceedings; Vol. 991).