Compact fiber-coupled three degree-of-freedom displacement interferometry for nanopositioning stage calibration

S. R. Gillmer, R. C.G. Smith, S. C. Woody, J. D. Ellis

Research output: Contribution to journalArticle

18 Scopus citations

Abstract

Heterodyne displacement interferometry is a widely accepted methodology capable of measuring displacements with sub-nanometer resolution in many applications. We present a compact heterodyne system capable of simultaneously measuring Z-displacement along with changes in pitch and yaw using a single measurement beam incident on a plane mirror target. The interferometer's measurement detector utilizes differential wavefront sensing to decouple and measure these three degrees of freedom. Reliable rotational measurements typically require calibration; however, two analytical models are discussed which predict the readout of rotational scaling factors.

Original languageEnglish (US)
Article number075205
JournalMeasurement Science and Technology
Volume25
Issue number7
DOIs
StatePublished - Jul 2014
Externally publishedYes

Keywords

  • displacement measuring interferometry
  • optical metrology
  • optical sensors
  • stage calibration

ASJC Scopus subject areas

  • Instrumentation
  • Engineering (miscellaneous)
  • Applied Mathematics

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