Compact fully monolithic optomechanical accelerometer

Felipe Guzman; Lee M. Kumanchik; Ruven Spannagel; Claus Braxmaier

Compact fully monolithic optomechanical accelerometer

Felipe Guzman, Lee M. Kumanchik, Ruven Spannagel, Claus Braxmaier

Optical Sciences, College of

Research output: Contribution to journal › Article › peer-review

Abstract

We present a highly compact and fully monolithic optomechanical accelerometer fabricated of a single wafer of fused-silica with a total volume of less than 2 cm³ and a total mass of approximately 4 grams. This sensor demonstrates an unprecedented mQ-product of 50 kg, highlighting its unique capabilities for reaching high sensitivity in acceleration sensing. The sensor includes a monolithically co-fabricated Fabry-Pérot interferometer that uses the accelerometer test mass as a mirror to measure its displacement in orders of 10^-12 m/√Hz, reaching acceleration sensitivities to the order of 100 ng/√Hz - 1 µg/√Hz above 1 Hz.

Original language	English (US)
Journal	Unknown Journal
State	Published - Oct 15 2018

ASJC Scopus subject areas

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title = "Compact fully monolithic optomechanical accelerometer",

abstract = "We present a highly compact and fully monolithic optomechanical accelerometer fabricated of a single wafer of fused-silica with a total volume of less than 2 cm3 and a total mass of approximately 4 grams. This sensor demonstrates an unprecedented mQ-product of 50 kg, highlighting its unique capabilities for reaching high sensitivity in acceleration sensing. The sensor includes a monolithically co-fabricated Fabry-P{\'e}rot interferometer that uses the accelerometer test mass as a mirror to measure its displacement in orders of 10-12 m/√Hz, reaching acceleration sensitivities to the order of 100 ng/√Hz - 1 µg/√Hz above 1 Hz.",

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AU - Kumanchik, Lee M.

AU - Spannagel, Ruven

AU - Braxmaier, Claus

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AB - We present a highly compact and fully monolithic optomechanical accelerometer fabricated of a single wafer of fused-silica with a total volume of less than 2 cm3 and a total mass of approximately 4 grams. This sensor demonstrates an unprecedented mQ-product of 50 kg, highlighting its unique capabilities for reaching high sensitivity in acceleration sensing. The sensor includes a monolithically co-fabricated Fabry-Pérot interferometer that uses the accelerometer test mass as a mirror to measure its displacement in orders of 10-12 m/√Hz, reaching acceleration sensitivities to the order of 100 ng/√Hz - 1 µg/√Hz above 1 Hz.

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