We present a highly compact and fully monolithic optomechanical accelerometer fabricated of a single wafer of fused-silica with a total volume of less than 2 cm3 and a total mass of approximately 4 grams. This sensor demonstrates an unprecedented mQ-product of 50 kg, highlighting its unique capabilities for reaching high sensitivity in acceleration sensing. The sensor includes a monolithically co-fabricated Fabry-Pérot interferometer that uses the accelerometer test mass as a mirror to measure its displacement in orders of 10-12 m/√Hz, reaching acceleration sensitivities to the order of 100 ng/√Hz - 1 µg/√Hz above 1 Hz.
|Original language||English (US)|
|State||Published - Oct 15 2018|
ASJC Scopus subject areas