Compact six degree-of-freedom interferometer for precision linear stage metrology

Xiangzhi Yu, Steven R. Gillmer, Stephen C. Howard, Shane C. Woody, Jonathan D. Ellis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations
Original languageEnglish (US)
Title of host publicationProceedings - ASPE 2015 Annual Meeting
PublisherAmerican Society for Precision Engineering, ASPE
Pages415-418
Number of pages4
ISBN (Electronic)9781887706698
StatePublished - Jan 1 2015
Externally publishedYes
Event30th Annual Meeting of the American Society for Precision Engineering, ASPE 2015 - Austin, United States
Duration: Nov 1 2015Nov 6 2015

Publication series

NameProceedings - ASPE 2015 Annual Meeting

Conference

Conference30th Annual Meeting of the American Society for Precision Engineering, ASPE 2015
CountryUnited States
CityAustin
Period11/1/1511/6/15

ASJC Scopus subject areas

  • Control and Systems Engineering

Cite this

Yu, X., Gillmer, S. R., Howard, S. C., Woody, S. C., & Ellis, J. D. (2015). Compact six degree-of-freedom interferometer for precision linear stage metrology. In Proceedings - ASPE 2015 Annual Meeting (pp. 415-418). (Proceedings - ASPE 2015 Annual Meeting). American Society for Precision Engineering, ASPE.