Comparison of gold particle removal from fused silica and thermal oxide surfaces in dilute ammonium hydroxide solutions

Viraj Pandit, Manish Keswani, Shariq Siddiqui, Srini Raghavan

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

Removal of gold particles (40 nm and 100 nm) from fused silica and thermal oxide surfaces in dilute ammonium hydroxide solutions has been investigated. The particle removal efficiency (PRE) from fused silica surface has been found to be a strong function of ammonium hydroxide concentration and bath temperature. PRE increases from 0 to 85 % with increase in bath temperature from 30 to 80 °C for ammonium hydroxide concentration of 1 %. Addition of megasonic energy to the ammonium hydroxide bath at 30 °C has also shown to improve the PRE significantly. In the case of thermal oxide, the removal of gold particles is much easier compared to that from fused silica. Even for cleaning at 30 °C, the PRE for oxide surface increases from 10 to 90 % with increase in ammonium hydroxide concentration from 0 % to 4 %. Atomic force microscopy measurements reveal that an adhesion force of 10 mN/m exists between fused silica and gold particles in 4 % ammonium hydroxide solution as opposed to only repulsive force in the case of thermal oxide.

Original languageEnglish (US)
Title of host publicationUltra Clean Processing of Semiconductor Surfaces X
PublisherTrans Tech Publications Ltd
Pages159-162
Number of pages4
ISBN (Print)9783037853887
DOIs
StatePublished - Jan 1 2012
Event10th International Symposium on Ultra Clean Processing of Semiconductor Surfaces, UCPSS 2010 - Ostend, Belgium
Duration: Sep 20 2010Sep 22 2010

Publication series

NameSolid State Phenomena
Volume187
ISSN (Print)1012-0394

Other

Other10th International Symposium on Ultra Clean Processing of Semiconductor Surfaces, UCPSS 2010
CountryBelgium
CityOstend
Period9/20/109/22/10

Keywords

  • Ammonium hydroxide
  • Cleaning
  • Deep UV mask
  • Fused silica
  • Gold particles
  • Megasonic energy
  • Thermal oxide

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Materials Science(all)
  • Condensed Matter Physics

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  • Cite this

    Pandit, V., Keswani, M., Siddiqui, S., & Raghavan, S. (2012). Comparison of gold particle removal from fused silica and thermal oxide surfaces in dilute ammonium hydroxide solutions. In Ultra Clean Processing of Semiconductor Surfaces X (pp. 159-162). (Solid State Phenomena; Vol. 187). Trans Tech Publications Ltd. https://doi.org/10.4028/www.scientific.net/SSP.187.159