Comparison of gold particle removal from fused silica and thermal oxide surfaces in dilute ammonium hydroxide solutions

Viraj Pandit, Manish K Keswani, Shariq Siddiqui, Srini Raghavan

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Removal of gold particles (40 nm and 100 nm) from fused silica and thermal oxide surfaces in dilute ammonium hydroxide solutions has been investigated. The particle removal efficiency (PRE) from fused silica surface has been found to be a strong function of ammonium hydroxide concentration and bath temperature. PRE increases from 0 to 85 % with increase in bath temperature from 30 to 80 °C for ammonium hydroxide concentration of 1 %. Addition of megasonic energy to the ammonium hydroxide bath at 30 °C has also shown to improve the PRE significantly. In the case of thermal oxide, the removal of gold particles is much easier compared to that from fused silica. Even for cleaning at 30 °C, the PRE for oxide surface increases from 10 to 90 % with increase in ammonium hydroxide concentration from 0 % to 4 %. Atomic force microscopy measurements reveal that an adhesion force of 10 mN/m exists between fused silica and gold particles in 4 % ammonium hydroxide solution as opposed to only repulsive force in the case of thermal oxide.

Original languageEnglish (US)
Title of host publicationSolid State Phenomena
PublisherTrans Tech Publications Ltd
Pages159-162
Number of pages4
Volume187
ISBN (Print)9783037853887
DOIs
StatePublished - 2012
Event10th International Symposium on Ultra Clean Processing of Semiconductor Surfaces, UCPSS 2010 - Ostend, Belgium
Duration: Sep 20 2010Sep 22 2010

Publication series

NameSolid State Phenomena
Volume187
ISSN (Print)10120394

Other

Other10th International Symposium on Ultra Clean Processing of Semiconductor Surfaces, UCPSS 2010
CountryBelgium
CityOstend
Period9/20/109/22/10

Fingerprint

Ammonium Hydroxide
Ammonium hydroxide
Fused silica
Gold
Oxides
hydroxides
gold
silicon dioxide
oxides
baths
Hot Temperature
Cleaning
Atomic force microscopy
cleaning
Adhesion
adhesion
Temperature
atomic force microscopy
temperature

Keywords

  • Ammonium hydroxide
  • Cleaning
  • Deep UV mask
  • Fused silica
  • Gold particles
  • Megasonic energy
  • Thermal oxide

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Atomic and Molecular Physics, and Optics

Cite this

Pandit, V., Keswani, M. K., Siddiqui, S., & Raghavan, S. (2012). Comparison of gold particle removal from fused silica and thermal oxide surfaces in dilute ammonium hydroxide solutions. In Solid State Phenomena (Vol. 187, pp. 159-162). (Solid State Phenomena; Vol. 187). Trans Tech Publications Ltd. https://doi.org/10.4028/www.scientific.net/SSP.187.159

Comparison of gold particle removal from fused silica and thermal oxide surfaces in dilute ammonium hydroxide solutions. / Pandit, Viraj; Keswani, Manish K; Siddiqui, Shariq; Raghavan, Srini.

Solid State Phenomena. Vol. 187 Trans Tech Publications Ltd, 2012. p. 159-162 (Solid State Phenomena; Vol. 187).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Pandit, V, Keswani, MK, Siddiqui, S & Raghavan, S 2012, Comparison of gold particle removal from fused silica and thermal oxide surfaces in dilute ammonium hydroxide solutions. in Solid State Phenomena. vol. 187, Solid State Phenomena, vol. 187, Trans Tech Publications Ltd, pp. 159-162, 10th International Symposium on Ultra Clean Processing of Semiconductor Surfaces, UCPSS 2010, Ostend, Belgium, 9/20/10. https://doi.org/10.4028/www.scientific.net/SSP.187.159
Pandit V, Keswani MK, Siddiqui S, Raghavan S. Comparison of gold particle removal from fused silica and thermal oxide surfaces in dilute ammonium hydroxide solutions. In Solid State Phenomena. Vol. 187. Trans Tech Publications Ltd. 2012. p. 159-162. (Solid State Phenomena). https://doi.org/10.4028/www.scientific.net/SSP.187.159
Pandit, Viraj ; Keswani, Manish K ; Siddiqui, Shariq ; Raghavan, Srini. / Comparison of gold particle removal from fused silica and thermal oxide surfaces in dilute ammonium hydroxide solutions. Solid State Phenomena. Vol. 187 Trans Tech Publications Ltd, 2012. pp. 159-162 (Solid State Phenomena).
@inproceedings{a64cabd9e5964ab8a13f6b86fa6f5235,
title = "Comparison of gold particle removal from fused silica and thermal oxide surfaces in dilute ammonium hydroxide solutions",
abstract = "Removal of gold particles (40 nm and 100 nm) from fused silica and thermal oxide surfaces in dilute ammonium hydroxide solutions has been investigated. The particle removal efficiency (PRE) from fused silica surface has been found to be a strong function of ammonium hydroxide concentration and bath temperature. PRE increases from 0 to 85 {\%} with increase in bath temperature from 30 to 80 °C for ammonium hydroxide concentration of 1 {\%}. Addition of megasonic energy to the ammonium hydroxide bath at 30 °C has also shown to improve the PRE significantly. In the case of thermal oxide, the removal of gold particles is much easier compared to that from fused silica. Even for cleaning at 30 °C, the PRE for oxide surface increases from 10 to 90 {\%} with increase in ammonium hydroxide concentration from 0 {\%} to 4 {\%}. Atomic force microscopy measurements reveal that an adhesion force of 10 mN/m exists between fused silica and gold particles in 4 {\%} ammonium hydroxide solution as opposed to only repulsive force in the case of thermal oxide.",
keywords = "Ammonium hydroxide, Cleaning, Deep UV mask, Fused silica, Gold particles, Megasonic energy, Thermal oxide",
author = "Viraj Pandit and Keswani, {Manish K} and Shariq Siddiqui and Srini Raghavan",
year = "2012",
doi = "10.4028/www.scientific.net/SSP.187.159",
language = "English (US)",
isbn = "9783037853887",
volume = "187",
series = "Solid State Phenomena",
publisher = "Trans Tech Publications Ltd",
pages = "159--162",
booktitle = "Solid State Phenomena",

}

TY - GEN

T1 - Comparison of gold particle removal from fused silica and thermal oxide surfaces in dilute ammonium hydroxide solutions

AU - Pandit, Viraj

AU - Keswani, Manish K

AU - Siddiqui, Shariq

AU - Raghavan, Srini

PY - 2012

Y1 - 2012

N2 - Removal of gold particles (40 nm and 100 nm) from fused silica and thermal oxide surfaces in dilute ammonium hydroxide solutions has been investigated. The particle removal efficiency (PRE) from fused silica surface has been found to be a strong function of ammonium hydroxide concentration and bath temperature. PRE increases from 0 to 85 % with increase in bath temperature from 30 to 80 °C for ammonium hydroxide concentration of 1 %. Addition of megasonic energy to the ammonium hydroxide bath at 30 °C has also shown to improve the PRE significantly. In the case of thermal oxide, the removal of gold particles is much easier compared to that from fused silica. Even for cleaning at 30 °C, the PRE for oxide surface increases from 10 to 90 % with increase in ammonium hydroxide concentration from 0 % to 4 %. Atomic force microscopy measurements reveal that an adhesion force of 10 mN/m exists between fused silica and gold particles in 4 % ammonium hydroxide solution as opposed to only repulsive force in the case of thermal oxide.

AB - Removal of gold particles (40 nm and 100 nm) from fused silica and thermal oxide surfaces in dilute ammonium hydroxide solutions has been investigated. The particle removal efficiency (PRE) from fused silica surface has been found to be a strong function of ammonium hydroxide concentration and bath temperature. PRE increases from 0 to 85 % with increase in bath temperature from 30 to 80 °C for ammonium hydroxide concentration of 1 %. Addition of megasonic energy to the ammonium hydroxide bath at 30 °C has also shown to improve the PRE significantly. In the case of thermal oxide, the removal of gold particles is much easier compared to that from fused silica. Even for cleaning at 30 °C, the PRE for oxide surface increases from 10 to 90 % with increase in ammonium hydroxide concentration from 0 % to 4 %. Atomic force microscopy measurements reveal that an adhesion force of 10 mN/m exists between fused silica and gold particles in 4 % ammonium hydroxide solution as opposed to only repulsive force in the case of thermal oxide.

KW - Ammonium hydroxide

KW - Cleaning

KW - Deep UV mask

KW - Fused silica

KW - Gold particles

KW - Megasonic energy

KW - Thermal oxide

UR - http://www.scopus.com/inward/record.url?scp=84860176675&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84860176675&partnerID=8YFLogxK

U2 - 10.4028/www.scientific.net/SSP.187.159

DO - 10.4028/www.scientific.net/SSP.187.159

M3 - Conference contribution

AN - SCOPUS:84860176675

SN - 9783037853887

VL - 187

T3 - Solid State Phenomena

SP - 159

EP - 162

BT - Solid State Phenomena

PB - Trans Tech Publications Ltd

ER -