Compensating film stress in thin mirrors using ion implantation

Brandon D. Chalifoux, Youwei Yao, Kevin B. Woller, Ralf K. Heilmann, Mark L. Schattenburg

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish (US)
Title of host publicationProceedings - 33rd ASPE Annual Meeting
PublisherAmerican Society for Precision Engineering, ASPE
Pages253-258
Number of pages6
ISBN (Electronic)9781887706773
StatePublished - 2018
Externally publishedYes
Event33rd Annual Meeting of the American Society for Precision Engineering, ASPE 2018 - Las Vegas, United States
Duration: Nov 4 2018Nov 9 2018

Publication series

NameProceedings - 33rd ASPE Annual Meeting

Conference

Conference33rd Annual Meeting of the American Society for Precision Engineering, ASPE 2018
Country/TerritoryUnited States
CityLas Vegas
Period11/4/1811/9/18

ASJC Scopus subject areas

  • Geochemistry and Petrology
  • Mechanical Engineering

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