Composite Thermal Micro-Actuator Array for Tactile Displays

Eniko T Enikov, Kalin V. Lazarov

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

Tactile perception of complex symbols through tactile stimulation is an exciting application of a phenomenon known as tactile illusion (TI). Sensation of motion on the skin can be produced by a limited number of discrete mechanical actuators applying light pressure over the skin. This phenomenon can thus be used as a neurophysiological testing tool to determine central and peripheral nervous system injury as well as providing an additional human-machine communication channel. This paper describes the development of a 4 × 5 actuator array of individual vibrating pixels for fingertip tactile communication. The array is approximately one square centimeter and utilizes novel micro-clutch MEMS technology. The individual pixels are turned ON and OFF by pairs of microscopic composite thermal actuators, while the main vibration is generated by a vibrating piezo-electric plate. The physiological parameters required for inducing tactile illusion are described. The fabrication sequence for the thermal micro-actuators along with actuation results are also presented.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsV.K. Varadan, L.B. Kish
Pages258-267
Number of pages10
Volume5055
DOIs
StatePublished - 2003
EventSmart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology - San Diego, CA, United States
Duration: Mar 3 2003Mar 5 2003

Other

OtherSmart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology
CountryUnited States
CitySan Diego, CA
Period3/3/033/5/03

Fingerprint

Actuators
actuators
Display devices
illusions
composite materials
Skin
Composite materials
Mechanical actuators
Pixels
peripheral nervous system
Clutches
communication
pixels
Neurology
clutches
illuminance
central nervous system
MEMS
stimulation
actuation

Keywords

  • Piezo-actuators
  • SU8
  • Tactile array
  • Tactile illusion
  • Thermal actuators

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Enikov, E. T., & Lazarov, K. V. (2003). Composite Thermal Micro-Actuator Array for Tactile Displays. In V. K. Varadan, & L. B. Kish (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 5055, pp. 258-267) https://doi.org/10.1117/12.483565

Composite Thermal Micro-Actuator Array for Tactile Displays. / Enikov, Eniko T; Lazarov, Kalin V.

Proceedings of SPIE - The International Society for Optical Engineering. ed. / V.K. Varadan; L.B. Kish. Vol. 5055 2003. p. 258-267.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Enikov, ET & Lazarov, KV 2003, Composite Thermal Micro-Actuator Array for Tactile Displays. in VK Varadan & LB Kish (eds), Proceedings of SPIE - The International Society for Optical Engineering. vol. 5055, pp. 258-267, Smart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, San Diego, CA, United States, 3/3/03. https://doi.org/10.1117/12.483565
Enikov ET, Lazarov KV. Composite Thermal Micro-Actuator Array for Tactile Displays. In Varadan VK, Kish LB, editors, Proceedings of SPIE - The International Society for Optical Engineering. Vol. 5055. 2003. p. 258-267 https://doi.org/10.1117/12.483565
Enikov, Eniko T ; Lazarov, Kalin V. / Composite Thermal Micro-Actuator Array for Tactile Displays. Proceedings of SPIE - The International Society for Optical Engineering. editor / V.K. Varadan ; L.B. Kish. Vol. 5055 2003. pp. 258-267
@inproceedings{c1b35dc929ad4218b47bce1c9c61fbad,
title = "Composite Thermal Micro-Actuator Array for Tactile Displays",
abstract = "Tactile perception of complex symbols through tactile stimulation is an exciting application of a phenomenon known as tactile illusion (TI). Sensation of motion on the skin can be produced by a limited number of discrete mechanical actuators applying light pressure over the skin. This phenomenon can thus be used as a neurophysiological testing tool to determine central and peripheral nervous system injury as well as providing an additional human-machine communication channel. This paper describes the development of a 4 × 5 actuator array of individual vibrating pixels for fingertip tactile communication. The array is approximately one square centimeter and utilizes novel micro-clutch MEMS technology. The individual pixels are turned ON and OFF by pairs of microscopic composite thermal actuators, while the main vibration is generated by a vibrating piezo-electric plate. The physiological parameters required for inducing tactile illusion are described. The fabrication sequence for the thermal micro-actuators along with actuation results are also presented.",
keywords = "Piezo-actuators, SU8, Tactile array, Tactile illusion, Thermal actuators",
author = "Enikov, {Eniko T} and Lazarov, {Kalin V.}",
year = "2003",
doi = "10.1117/12.483565",
language = "English (US)",
volume = "5055",
pages = "258--267",
editor = "V.K. Varadan and L.B. Kish",
booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",

}

TY - GEN

T1 - Composite Thermal Micro-Actuator Array for Tactile Displays

AU - Enikov, Eniko T

AU - Lazarov, Kalin V.

PY - 2003

Y1 - 2003

N2 - Tactile perception of complex symbols through tactile stimulation is an exciting application of a phenomenon known as tactile illusion (TI). Sensation of motion on the skin can be produced by a limited number of discrete mechanical actuators applying light pressure over the skin. This phenomenon can thus be used as a neurophysiological testing tool to determine central and peripheral nervous system injury as well as providing an additional human-machine communication channel. This paper describes the development of a 4 × 5 actuator array of individual vibrating pixels for fingertip tactile communication. The array is approximately one square centimeter and utilizes novel micro-clutch MEMS technology. The individual pixels are turned ON and OFF by pairs of microscopic composite thermal actuators, while the main vibration is generated by a vibrating piezo-electric plate. The physiological parameters required for inducing tactile illusion are described. The fabrication sequence for the thermal micro-actuators along with actuation results are also presented.

AB - Tactile perception of complex symbols through tactile stimulation is an exciting application of a phenomenon known as tactile illusion (TI). Sensation of motion on the skin can be produced by a limited number of discrete mechanical actuators applying light pressure over the skin. This phenomenon can thus be used as a neurophysiological testing tool to determine central and peripheral nervous system injury as well as providing an additional human-machine communication channel. This paper describes the development of a 4 × 5 actuator array of individual vibrating pixels for fingertip tactile communication. The array is approximately one square centimeter and utilizes novel micro-clutch MEMS technology. The individual pixels are turned ON and OFF by pairs of microscopic composite thermal actuators, while the main vibration is generated by a vibrating piezo-electric plate. The physiological parameters required for inducing tactile illusion are described. The fabrication sequence for the thermal micro-actuators along with actuation results are also presented.

KW - Piezo-actuators

KW - SU8

KW - Tactile array

KW - Tactile illusion

KW - Thermal actuators

UR - http://www.scopus.com/inward/record.url?scp=0242467936&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0242467936&partnerID=8YFLogxK

U2 - 10.1117/12.483565

DO - 10.1117/12.483565

M3 - Conference contribution

AN - SCOPUS:0242467936

VL - 5055

SP - 258

EP - 267

BT - Proceedings of SPIE - The International Society for Optical Engineering

A2 - Varadan, V.K.

A2 - Kish, L.B.

ER -