Composite Thermal Micro-Actuator Array for Tactile Displays

Eniko T. Enikov, Kalin V. Lazarov

Research output: Contribution to journalConference article

2 Scopus citations

Abstract

Tactile perception of complex symbols through tactile stimulation is an exciting application of a phenomenon known as tactile illusion (TI). Sensation of motion on the skin can be produced by a limited number of discrete mechanical actuators applying light pressure over the skin. This phenomenon can thus be used as a neurophysiological testing tool to determine central and peripheral nervous system injury as well as providing an additional human-machine communication channel. This paper describes the development of a 4 × 5 actuator array of individual vibrating pixels for fingertip tactile communication. The array is approximately one square centimeter and utilizes novel micro-clutch MEMS technology. The individual pixels are turned ON and OFF by pairs of microscopic composite thermal actuators, while the main vibration is generated by a vibrating piezo-electric plate. The physiological parameters required for inducing tactile illusion are described. The fabrication sequence for the thermal micro-actuators along with actuation results are also presented.

Original languageEnglish (US)
Pages (from-to)258-267
Number of pages10
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume5055
DOIs
StatePublished - Nov 26 2003
EventSmart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology - San Diego, CA, United States
Duration: Mar 3 2003Mar 5 2003

Keywords

  • Piezo-actuators
  • SU8
  • Tactile array
  • Tactile illusion
  • Thermal actuators

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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