Control of sonoluminescence in carbon dioxide containing DI water at near neutral pH conditions

Sangita Kumari, Manish Keswani, Satish Kumar Singh, Mark Beck, Eric Leibscher, Pierre Deymier, Srini Raghavan

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations

Abstract

Light emission in sound-irradiated liquids, known as Sonoluminescence (SL), is associated with the phenomenon of cavitation that affects wafer damage during megasonic processing of wafers. It has been shown that the intensity of SL can be substantially decreased through the dissolution of carbon dioxide in deionized water. However, such dissolution decreases the pH to roughly 4.0, which is not very desirable for the removal of contaminant particles. This paper reports two chemical systems that are capable of taking advantage of the effect of CO2 while allowing the use of slightly higher pH values. Specifically, NH4OH/CO2 and NH4HCO 3/dilute HCl systems have been shown to be capable of well controlled reduction in SL at pH 5.7 or 7.0. In order to test whether the free radical scavenging ability of CO2 may be responsible for its strong SL-inhibitory effect, the effect of a well known free radical scavenger, dimethyl sulfoxide (DMSO), on SL produced in DI water has been investigated.

Original languageEnglish (US)
Title of host publicationUltra Clean Processing of Semiconductor Surfaces X
PublisherTrans Tech Publications Ltd
Pages177-180
Number of pages4
ISBN (Print)9783037853887
DOIs
StatePublished - Jan 1 2012
Event10th International Symposium on Ultra Clean Processing of Semiconductor Surfaces, UCPSS 2010 - Ostend, Belgium
Duration: Sep 20 2010Sep 22 2010

Publication series

NameSolid State Phenomena
Volume187
ISSN (Print)1012-0394

Other

Other10th International Symposium on Ultra Clean Processing of Semiconductor Surfaces, UCPSS 2010
CountryBelgium
CityOstend
Period9/20/109/22/10

Keywords

  • Carbon dioxide
  • Damage
  • Megasonic cleaning
  • Sonoluminescence

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Materials Science(all)
  • Condensed Matter Physics

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    Kumari, S., Keswani, M., Singh, S. K., Beck, M., Leibscher, E., Deymier, P., & Raghavan, S. (2012). Control of sonoluminescence in carbon dioxide containing DI water at near neutral pH conditions. In Ultra Clean Processing of Semiconductor Surfaces X (pp. 177-180). (Solid State Phenomena; Vol. 187). Trans Tech Publications Ltd. https://doi.org/10.4028/www.scientific.net/SSP.187.177