Controlling transitional time of DMD mirror array by physical and electrical methods

Xianyue Deng, Yuzuru Takashima

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Digital Micromirror Device (DMD) is a commercial and mass-produced Micro Electromechanical System (MEMS) spatial light modulator (SLM) consisting of millions of mirrors that spatially modulate lights by switching it between on and off states. Between the on- and off-states, transitional states exist where micromirror changes tilt angle. We report a method to control the transitional time of the mirror array by controlling the pressure of the ambient air. The increased air pressure to 100 psi increases mirrors transitional time by 20%. We also address the possibility of controlling the transitional time electrically.

Original languageEnglish (US)
Title of host publicationODS 2020
Subtitle of host publicationIndustrial Optical Devices and Systems
EditorsRyuichi Katayama, Yuzuru Takashima
PublisherSPIE
ISBN (Electronic)9781510638068
DOIs
StatePublished - 2020
EventIndustrial Optical Devices and Systems Conference 2020, ODS 2020 - Virtual, Online, United States
Duration: Aug 24 2020Sep 4 2020

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume11500
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

ConferenceIndustrial Optical Devices and Systems Conference 2020, ODS 2020
CountryUnited States
CityVirtual, Online
Period8/24/209/4/20

Keywords

  • DMD

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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