Correlating shear force and coefficient of friction to platen motor current in copper, cobalt, and shallow trench isolation chemical mechanical planarization at steady-state conditions

C. Frank, R. Headley, Y. Sampurno, A. Philipossian

Research output: Contribution to journalArticle

Abstract

In a follow up from our earlier work that focused on highlighting the relationship among platen motor current (PMC), shear force (SF), and coefficient of friction (COF) in non-steady-state cases, we examined whether PMC was a reliable indicator that could be used in place of SF and COF data at steady-state conditions. For the 12 cases studied, we examined 60 distinct steady-state steps from their associated Stribeck+ curves. Data averaging, coupled with a trend matching algorithm, showed that for large time spans at steady-state, PMC was a reasonably good indicator of both SF and COF, as 68.5% of the time, PMC and SF trends matched (ranges between 62% to 86%) for all 60 cases. Regarding PMC and COF, we observed trend matching for 68.8% of the time (ranges between 62% and 86%) for all 60 cases. However, correlations between SF and PMC, and also between COF and PMC were found to be very poor (in most cases, non-existent) since at small timescales PMC was not sensitive enough to capture the instantaneous stick-slip occurrences and other important tribological and fluid dynamics phenomena present in CMP.

Original languageEnglish (US)
Article number024012
JournalECS Journal of Solid State Science and Technology
Volume9
Issue number2
DOIs
StatePublished - Jan 17 2020

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

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