Cyclic nanoindentation for examination of the piezoresistivity and the strain-sensor behavior of indium-tin-oxide thin films

E. E. Harea, Katerina E Aifantis, K. M. Pyrtsac, L. Ghimpu

Research output: Contribution to journalArticle

Abstract

The piezoresistivity of indium-tin-oxide (ITO) thin films was investigated using the three point bending method combined with cyclic indentation. The 500 nm thick ITO films were deposited on glass slides using magnetron sputtering. The resistance variation of the resulting ITO/glass based sensors during cyclic indentation showed a good sensitivity and fast response to mechanical strain, with the gauge factor ranging from -1.4 to -3.7.

Original languageEnglish (US)
Pages (from-to)53-59
Number of pages7
JournalNATO Science for Peace and Security Series A: Chemistry and Biology
Volume39
DOIs
StatePublished - 2015
Externally publishedYes

Fingerprint

Nanoindentation
Tin oxides
Indentation
Indium
Oxide films
ITO glass
Thin films
Glass
Sensors
Magnetron sputtering
Gages
indium tin oxide

Keywords

  • Cyclic nanoindentation
  • Strain sensor
  • Thin films

ASJC Scopus subject areas

  • Chemistry(all)
  • Biochemistry, Genetics and Molecular Biology (miscellaneous)
  • Safety, Risk, Reliability and Quality

Cite this

@article{6e2d06cbc01547e29d61693c053c9113,
title = "Cyclic nanoindentation for examination of the piezoresistivity and the strain-sensor behavior of indium-tin-oxide thin films",
abstract = "The piezoresistivity of indium-tin-oxide (ITO) thin films was investigated using the three point bending method combined with cyclic indentation. The 500 nm thick ITO films were deposited on glass slides using magnetron sputtering. The resistance variation of the resulting ITO/glass based sensors during cyclic indentation showed a good sensitivity and fast response to mechanical strain, with the gauge factor ranging from -1.4 to -3.7.",
keywords = "Cyclic nanoindentation, Strain sensor, Thin films",
author = "Harea, {E. E.} and Aifantis, {Katerina E} and Pyrtsac, {K. M.} and L. Ghimpu",
year = "2015",
doi = "10.1007/978-94-017-9697-2_5",
language = "English (US)",
volume = "39",
pages = "53--59",
journal = "NATO Science for Peace and Security Series A: Chemistry and Biology",
issn = "1874-6489",
publisher = "Springer Verlag",

}

TY - JOUR

T1 - Cyclic nanoindentation for examination of the piezoresistivity and the strain-sensor behavior of indium-tin-oxide thin films

AU - Harea, E. E.

AU - Aifantis, Katerina E

AU - Pyrtsac, K. M.

AU - Ghimpu, L.

PY - 2015

Y1 - 2015

N2 - The piezoresistivity of indium-tin-oxide (ITO) thin films was investigated using the three point bending method combined with cyclic indentation. The 500 nm thick ITO films were deposited on glass slides using magnetron sputtering. The resistance variation of the resulting ITO/glass based sensors during cyclic indentation showed a good sensitivity and fast response to mechanical strain, with the gauge factor ranging from -1.4 to -3.7.

AB - The piezoresistivity of indium-tin-oxide (ITO) thin films was investigated using the three point bending method combined with cyclic indentation. The 500 nm thick ITO films were deposited on glass slides using magnetron sputtering. The resistance variation of the resulting ITO/glass based sensors during cyclic indentation showed a good sensitivity and fast response to mechanical strain, with the gauge factor ranging from -1.4 to -3.7.

KW - Cyclic nanoindentation

KW - Strain sensor

KW - Thin films

UR - http://www.scopus.com/inward/record.url?scp=84922441978&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84922441978&partnerID=8YFLogxK

U2 - 10.1007/978-94-017-9697-2_5

DO - 10.1007/978-94-017-9697-2_5

M3 - Article

AN - SCOPUS:84922441978

VL - 39

SP - 53

EP - 59

JO - NATO Science for Peace and Security Series A: Chemistry and Biology

JF - NATO Science for Peace and Security Series A: Chemistry and Biology

SN - 1874-6489

ER -