Cyclic nanoindentation for examination of the piezoresistivity and the strain-sensor behavior of indium-tin-oxide thin films

E. E. Harea, Katerina E Aifantis, K. M. Pyrtsac, L. Ghimpu

Research output: Chapter in Book/Report/Conference proceedingChapter

Abstract

The piezoresistivity of indium-tin-oxide (ITO) thin films was investigated using the three point bending method combined with cyclic indentation. The 500 nm thick ITO films were deposited on glass slides using magnetron sputtering. The resistance variation of the resulting ITO/glass based sensors during cyclic indentation showed a good sensitivity and fast response to mechanical strain, with the gauge factor ranging from −1.4 to−3.7.

Original languageEnglish (US)
Title of host publicationNanoscience Advances in CBRN Agents Detection, Information and Energy Security
PublisherSpringer Netherlands
Pages53-59
Number of pages7
ISBN (Print)9789401796972, 9789401796965
DOIs
StatePublished - Jan 1 2015

Keywords

  • Cyclic nanoindentation
  • Strain sensor
  • Thin films

ASJC Scopus subject areas

  • Biochemistry, Genetics and Molecular Biology(all)
  • Engineering(all)
  • Materials Science(all)

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    Harea, E. E., Aifantis, K. E., Pyrtsac, K. M., & Ghimpu, L. (2015). Cyclic nanoindentation for examination of the piezoresistivity and the strain-sensor behavior of indium-tin-oxide thin films. In Nanoscience Advances in CBRN Agents Detection, Information and Energy Security (pp. 53-59). Springer Netherlands. https://doi.org/10.1007/978-94-017-9697-2_5