Auger electron spectroscopy has been applied to the quantitative surface analysis of a series of metals (Ag, Cd, In, Sn), indium-tin alloys, indium and tin oxides, and indium-tin oxide (ITO) films. Spectra were obtained by two methods: (1) the conventional modulation technique, which results in the derivative spectrum, and (2) a direct current measurement, which gives an undifferentiated spectrum. For data collected in the latter mode, an instrumental approach and secondary electron background correlation are discussed. Quantitative results obtained by using this approach are shown to be more accurate than the traditional measurement method.
|Original language||English (US)|
|Number of pages||7|
|Publication status||Published - Dec 1982|
ASJC Scopus subject areas
- Analytical Chemistry