Data processing for point-based in situ metrology of freeform optical surface

Yu Zhang, Hsiang Nan Cheng, Rengmao Wu, Rongguang Liang

Research output: Contribution to journalArticle

4 Scopus citations

Abstract

Freeform surfaces are widely used in advanced optical systems and the point-based metrology methods are often used for freeform surface measurement. In order to accurately process the measured data from point-based metrology system, the coordinate matching and surface fitting are essential. To ensure the matching efficiency and accuracy, we use a two-step coordinate matching method: pre-adjustment and accurate adjustment. We also develop an improved Newton iterative (INI) fitting algorithm to generate initial value and improve the fitting speed. The simulation and experiment verify the correctness and feasibility of the data processing.

Original languageEnglish (US)
Pages (from-to)13414-13424
Number of pages11
JournalOptics Express
Volume25
Issue number12
DOIs
StatePublished - Jun 12 2017

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ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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