Deconvolution of auger electron spectra for lineshape analysis and quantitation using a fast fourier transform algorithm

A Fast Fourier Transform algorithm for the deconvolution of electron energy loss processes and instrumental broadening functions from Auger lineshapes is presented. This method uses a scaled electron backscatter spectrum at the energy of the Auger transition to approximate the spectral features in the data due to energy-loss processes and instrumental broadening effects (the sample-instrument response function, SIRF). Auger spectra, following deconvolution of the SIRF, show little variation to changes in the scaling of the low energy loss features of this backscatter spectrum, and little sensitivity to the choice of the truncation point of the SIRF in the frequency domain during apodization. Auger transitions for a series of sulfur oxyanions standards are comparable to transitions expected from independent molecular orbital calculations. The areas of the deconvolved oxygen (KLL) and sulfur (LMM) spectra were used to calculate oxygen-to-sulfur atomic ratios which were then corrected using standard theories for electron escape depth, electron impact ionization cross section and backscattering coefficient. These relative atomic ratios agree with the stoichiometry obtained from the molecular formulas of the standard compounds.