TY - JOUR
T1 - Deconvolution of auger electron spectra for lineshape analysis and quantitation using a fast fourier transform algorithm
AU - Nebesny, K. W.
AU - Armstrong, N. R.
N1 - Funding Information:
This work was supported by the Department of Energy, Sandia National Laboratories and by a grant from the National Science Foundation CHE83-17769. Stimulating conversations with Peter Griffiths (University of California, Riverside) and Bill Rogers, Jack Houston and Bob Rye (Sandia National Laboratories) are also gratefully acknowledged.
PY - 1986
Y1 - 1986
N2 - A Fast Fourier Transform algorithm for the deconvolution of electron energy loss processes and instrumental broadening functions from Auger lineshapes is presented. This method uses a scaled electron backscatter spectrum at the energy of the Auger transition to approximate the spectral features in the data due to energy-loss processes and instrumental broadening effects (the sample-instrument response function, SIRF). Auger spectra, following deconvolution of the SIRF, show little variation to changes in the scaling of the low energy loss features of this backscatter spectrum, and little sensitivity to the choice of the truncation point of the SIRF in the frequency domain during apodization. Auger transitions for a series of sulfur oxyanions standards are comparable to transitions expected from independent molecular orbital calculations. The areas of the deconvolved oxygen (KLL) and sulfur (LMM) spectra were used to calculate oxygen-to-sulfur atomic ratios which were then corrected using standard theories for electron escape depth, electron impact ionization cross section and backscattering coefficient. These relative atomic ratios agree with the stoichiometry obtained from the molecular formulas of the standard compounds.
AB - A Fast Fourier Transform algorithm for the deconvolution of electron energy loss processes and instrumental broadening functions from Auger lineshapes is presented. This method uses a scaled electron backscatter spectrum at the energy of the Auger transition to approximate the spectral features in the data due to energy-loss processes and instrumental broadening effects (the sample-instrument response function, SIRF). Auger spectra, following deconvolution of the SIRF, show little variation to changes in the scaling of the low energy loss features of this backscatter spectrum, and little sensitivity to the choice of the truncation point of the SIRF in the frequency domain during apodization. Auger transitions for a series of sulfur oxyanions standards are comparable to transitions expected from independent molecular orbital calculations. The areas of the deconvolved oxygen (KLL) and sulfur (LMM) spectra were used to calculate oxygen-to-sulfur atomic ratios which were then corrected using standard theories for electron escape depth, electron impact ionization cross section and backscattering coefficient. These relative atomic ratios agree with the stoichiometry obtained from the molecular formulas of the standard compounds.
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U2 - 10.1016/0368-2048(86)80055-X
DO - 10.1016/0368-2048(86)80055-X
M3 - Article
AN - SCOPUS:30244470766
VL - 37
SP - 355
EP - 373
JO - Journal of Electron Spectroscopy and Related Phenomena
JF - Journal of Electron Spectroscopy and Related Phenomena
SN - 0368-2048
IS - 3
ER -