Design, analysis and fabrication of a meso-scale centrifugal compressor

A. Laveau, J. S. Kapat, L. C. Chow, Eniko T Enikov, K. B. Sundaram

Research output: Chapter in Book/Report/Conference proceedingChapter

11 Citations (Scopus)

Abstract

A gas or vapor compressor is one of the key components of many engineering systems, such as certain designs of vapor compression refrigeration systems, cryo-coolers, air handlers. For meso-scale systems with linear dimensions of a few centimeters, conventional designs do not work efficiently because of rather large relative tolerances, and hence these meso-scale systems require micro-fabricated components for efficient operation. This paper presents a meso-scale centrifugal compressor fabricated by photo-lithographic techniques. A preliminary design based on 1-D flow analysis using air as the working fluid shows that a 50 mm diameter centrifugal compressor with a blade height of 200 μm gives a static pressure ratio of 1.12. In this design, the impeller has 10 full blades and 10 splitter blades. Each blade has the NACA profile 9510 with the maximum camber at 50% of the chord. These impeller blades have exit angles 35° with exit flow angles of 60°. A vaned diffuser having 20 equally spaced vanes with the same NACA profile is used to improve compressor efficiency. A 3-D compressible, viscous flow analysis has been done using a commercial finite volume software. The results of this analysis allowed the verification of the flow characteristics inside the meso-scale centrifugal compressor. The compressor has been fabricated using micro-fabrication techniques. The rotor and the stator are made by etching a silicon wafer by using DRIE (Deep Reactive Ion Etching) technique. A Pyrex wafer is then bonded to the stator for visual access inside the compressor.

Original languageEnglish (US)
Title of host publicationAmerican Society of Mechanical Engineers, Advanced Energy Systems Division (Publication) AES
Pages129-137
Number of pages9
Volume40
StatePublished - 2000
Externally publishedYes

Fingerprint

Centrifugal compressors
Compressors
Fabrication
Stators
Vapor compression refrigeration
Cambers
Microfabrication
Reactive ion etching
Viscous flow
Air
Systems engineering
Silicon wafers
Turbomachine blades
Etching
Rotors
Vapors
Fluids
Gases

ASJC Scopus subject areas

  • Energy Engineering and Power Technology
  • Mechanical Engineering

Cite this

Laveau, A., Kapat, J. S., Chow, L. C., Enikov, E. T., & Sundaram, K. B. (2000). Design, analysis and fabrication of a meso-scale centrifugal compressor. In American Society of Mechanical Engineers, Advanced Energy Systems Division (Publication) AES (Vol. 40, pp. 129-137)

Design, analysis and fabrication of a meso-scale centrifugal compressor. / Laveau, A.; Kapat, J. S.; Chow, L. C.; Enikov, Eniko T; Sundaram, K. B.

American Society of Mechanical Engineers, Advanced Energy Systems Division (Publication) AES. Vol. 40 2000. p. 129-137.

Research output: Chapter in Book/Report/Conference proceedingChapter

Laveau, A, Kapat, JS, Chow, LC, Enikov, ET & Sundaram, KB 2000, Design, analysis and fabrication of a meso-scale centrifugal compressor. in American Society of Mechanical Engineers, Advanced Energy Systems Division (Publication) AES. vol. 40, pp. 129-137.
Laveau A, Kapat JS, Chow LC, Enikov ET, Sundaram KB. Design, analysis and fabrication of a meso-scale centrifugal compressor. In American Society of Mechanical Engineers, Advanced Energy Systems Division (Publication) AES. Vol. 40. 2000. p. 129-137
Laveau, A. ; Kapat, J. S. ; Chow, L. C. ; Enikov, Eniko T ; Sundaram, K. B. / Design, analysis and fabrication of a meso-scale centrifugal compressor. American Society of Mechanical Engineers, Advanced Energy Systems Division (Publication) AES. Vol. 40 2000. pp. 129-137
@inbook{9229cc1b3e0540ddb2207cab6d607082,
title = "Design, analysis and fabrication of a meso-scale centrifugal compressor",
abstract = "A gas or vapor compressor is one of the key components of many engineering systems, such as certain designs of vapor compression refrigeration systems, cryo-coolers, air handlers. For meso-scale systems with linear dimensions of a few centimeters, conventional designs do not work efficiently because of rather large relative tolerances, and hence these meso-scale systems require micro-fabricated components for efficient operation. This paper presents a meso-scale centrifugal compressor fabricated by photo-lithographic techniques. A preliminary design based on 1-D flow analysis using air as the working fluid shows that a 50 mm diameter centrifugal compressor with a blade height of 200 μm gives a static pressure ratio of 1.12. In this design, the impeller has 10 full blades and 10 splitter blades. Each blade has the NACA profile 9510 with the maximum camber at 50{\%} of the chord. These impeller blades have exit angles 35° with exit flow angles of 60°. A vaned diffuser having 20 equally spaced vanes with the same NACA profile is used to improve compressor efficiency. A 3-D compressible, viscous flow analysis has been done using a commercial finite volume software. The results of this analysis allowed the verification of the flow characteristics inside the meso-scale centrifugal compressor. The compressor has been fabricated using micro-fabrication techniques. The rotor and the stator are made by etching a silicon wafer by using DRIE (Deep Reactive Ion Etching) technique. A Pyrex wafer is then bonded to the stator for visual access inside the compressor.",
author = "A. Laveau and Kapat, {J. S.} and Chow, {L. C.} and Enikov, {Eniko T} and Sundaram, {K. B.}",
year = "2000",
language = "English (US)",
volume = "40",
pages = "129--137",
booktitle = "American Society of Mechanical Engineers, Advanced Energy Systems Division (Publication) AES",

}

TY - CHAP

T1 - Design, analysis and fabrication of a meso-scale centrifugal compressor

AU - Laveau, A.

AU - Kapat, J. S.

AU - Chow, L. C.

AU - Enikov, Eniko T

AU - Sundaram, K. B.

PY - 2000

Y1 - 2000

N2 - A gas or vapor compressor is one of the key components of many engineering systems, such as certain designs of vapor compression refrigeration systems, cryo-coolers, air handlers. For meso-scale systems with linear dimensions of a few centimeters, conventional designs do not work efficiently because of rather large relative tolerances, and hence these meso-scale systems require micro-fabricated components for efficient operation. This paper presents a meso-scale centrifugal compressor fabricated by photo-lithographic techniques. A preliminary design based on 1-D flow analysis using air as the working fluid shows that a 50 mm diameter centrifugal compressor with a blade height of 200 μm gives a static pressure ratio of 1.12. In this design, the impeller has 10 full blades and 10 splitter blades. Each blade has the NACA profile 9510 with the maximum camber at 50% of the chord. These impeller blades have exit angles 35° with exit flow angles of 60°. A vaned diffuser having 20 equally spaced vanes with the same NACA profile is used to improve compressor efficiency. A 3-D compressible, viscous flow analysis has been done using a commercial finite volume software. The results of this analysis allowed the verification of the flow characteristics inside the meso-scale centrifugal compressor. The compressor has been fabricated using micro-fabrication techniques. The rotor and the stator are made by etching a silicon wafer by using DRIE (Deep Reactive Ion Etching) technique. A Pyrex wafer is then bonded to the stator for visual access inside the compressor.

AB - A gas or vapor compressor is one of the key components of many engineering systems, such as certain designs of vapor compression refrigeration systems, cryo-coolers, air handlers. For meso-scale systems with linear dimensions of a few centimeters, conventional designs do not work efficiently because of rather large relative tolerances, and hence these meso-scale systems require micro-fabricated components for efficient operation. This paper presents a meso-scale centrifugal compressor fabricated by photo-lithographic techniques. A preliminary design based on 1-D flow analysis using air as the working fluid shows that a 50 mm diameter centrifugal compressor with a blade height of 200 μm gives a static pressure ratio of 1.12. In this design, the impeller has 10 full blades and 10 splitter blades. Each blade has the NACA profile 9510 with the maximum camber at 50% of the chord. These impeller blades have exit angles 35° with exit flow angles of 60°. A vaned diffuser having 20 equally spaced vanes with the same NACA profile is used to improve compressor efficiency. A 3-D compressible, viscous flow analysis has been done using a commercial finite volume software. The results of this analysis allowed the verification of the flow characteristics inside the meso-scale centrifugal compressor. The compressor has been fabricated using micro-fabrication techniques. The rotor and the stator are made by etching a silicon wafer by using DRIE (Deep Reactive Ion Etching) technique. A Pyrex wafer is then bonded to the stator for visual access inside the compressor.

UR - http://www.scopus.com/inward/record.url?scp=0040197806&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0040197806&partnerID=8YFLogxK

M3 - Chapter

AN - SCOPUS:0040197806

VL - 40

SP - 129

EP - 137

BT - American Society of Mechanical Engineers, Advanced Energy Systems Division (Publication) AES

ER -