Design and calibration of large dynamic range optical metrology systems

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)

Abstract

Optical metrology requiring a large dynamic range places several requirements on the design and operation on the instrument. In addition to being able to detect the part or wavefront shape to the required range and precision, the measurements must also be calibrated to remove the induced errors associated with operation in a non-null fashion. This paper demonstrates the need for this calibration, and presents the results of a system calibration of a non-null interferometric measurement.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsJ.C. Wyant, X. Zhang
Volume6024
DOIs
StatePublished - 2005
EventICO20: Optical Devices and Instruments - Changchun, China
Duration: Aug 21 2005Aug 26 2005

Other

OtherICO20: Optical Devices and Instruments
CountryChina
CityChangchun
Period8/21/058/26/05

Fingerprint

metrology
dynamic range
Calibration
Wavefronts
requirements

Keywords

  • Aspheres
  • Interferometry
  • Optical Metrology
  • Optical Testing
  • Reverse Raytracing

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Greivenkamp, J. E. (2005). Design and calibration of large dynamic range optical metrology systems. In J. C. Wyant, & X. Zhang (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 6024). [602403] https://doi.org/10.1117/12.666804

Design and calibration of large dynamic range optical metrology systems. / Greivenkamp, John E.

Proceedings of SPIE - The International Society for Optical Engineering. ed. / J.C. Wyant; X. Zhang. Vol. 6024 2005. 602403.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Greivenkamp, JE 2005, Design and calibration of large dynamic range optical metrology systems. in JC Wyant & X Zhang (eds), Proceedings of SPIE - The International Society for Optical Engineering. vol. 6024, 602403, ICO20: Optical Devices and Instruments, Changchun, China, 8/21/05. https://doi.org/10.1117/12.666804
Greivenkamp JE. Design and calibration of large dynamic range optical metrology systems. In Wyant JC, Zhang X, editors, Proceedings of SPIE - The International Society for Optical Engineering. Vol. 6024. 2005. 602403 https://doi.org/10.1117/12.666804
Greivenkamp, John E. / Design and calibration of large dynamic range optical metrology systems. Proceedings of SPIE - The International Society for Optical Engineering. editor / J.C. Wyant ; X. Zhang. Vol. 6024 2005.
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