Design and calibration of large dynamic range optical metrology systems

Research output: Contribution to journalConference article

6 Scopus citations

Abstract

Optical metrology requiring a large dynamic range places several requirements on the design and operation on the instrument. In addition to being able to detect the part or wavefront shape to the required range and precision, the measurements must also be calibrated to remove the induced errors associated with operation in a non-null fashion. This paper demonstrates the need for this calibration, and presents the results of a system calibration of a non-null interferometric measurement.

Original languageEnglish (US)
Article number602403
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume6024
DOIs
StatePublished - Dec 1 2005
EventICO20: Optical Devices and Instruments - Changchun, China
Duration: Aug 21 2005Aug 26 2005

Keywords

  • Aspheres
  • Interferometry
  • Optical Metrology
  • Optical Testing
  • Reverse Raytracing

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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