Design and characterization of micro-inertia switches fabricated using low-temperature metal-electroplating technology

Wei Ma, Yitshak Zohar, Man Wong

Research output: Contribution to journalConference article

3 Scopus citations

Abstract

Inertia micro-switches have been designed and realized using a low-temperature metal-electroplating technology compatible with processed substrates containing micro-electronic circuits. A simple but accurate lumped spring-mass model is developed based on analytical and numerical analyses. Predictions of the behavior of switches with different geometric designs have been verified using both drop hammer and shaker tests. With the application of an anti-stiction hydrophobic coating, improved storage time and un-encapsulated switches making over 50 million contacts have been demonstrated in room ambient.

Original languageEnglish (US)
Pages (from-to)214-221
Number of pages8
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4981
DOIs
StatePublished - May 26 2003
Externally publishedYes
EventMEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II - San Jose, CA, United States
Duration: Jan 28 2003Jan 29 2003

Keywords

  • Anti-stiction coating
  • Electroplating
  • Inertia micro-switch
  • Threshold acceleration

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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