Design and fabrication of an integrated microsystem for microcapillary electrophoresis

Vick Chuen Chan, Maria Carles, Nikolaus J. Sucher, Man Wong, Yitshak Zohar

Research output: Contribution to journalArticle

30 Citations (Scopus)

Abstract

A capillary electrophoresis microsystem integrated with feed-through platinum electrodes was designed and fabricated for the separation of DNA fragments. A novel glass-to-silicon bonding technology, which allows anodic bonding of a glass wafer to a silicon wafer coated with a thick dielectric film by the inclusion of a thin intermediate amorphous silicon layer, was developed and employed to construct the microsystem. Despite the existence of a thick insulating material and non-uniform topography, robust devices without fluid leakage were obtained. Electrophoretic manipulation and separation of DNA fragments after capillary pre-treatment have been demonstrated and several operational considerations are discussed. The system performance suggests that silicon-based microsystems can be advantageous and practical for the fabrication of integrated microcapillary electrophoresis devices.

Original languageEnglish (US)
Pages (from-to)914-921
Number of pages8
JournalJournal of Micromechanics and Microengineering
Volume13
Issue number6
DOIs
StatePublished - Nov 2003
Externally publishedYes

Fingerprint

Microsystems
electrophoresis
Electrophoresis
Silicon
Fabrication
fabrication
silicon
DNA
deoxyribonucleic acid
fragments
wafers
Glass
Capillary electrophoresis
Dielectric films
Insulating materials
glass
Leakage (fluid)
Platinum
Amorphous silicon
Silicon wafers

ASJC Scopus subject areas

  • Instrumentation
  • Materials Science(all)
  • Mechanics of Materials
  • Computational Mechanics

Cite this

Design and fabrication of an integrated microsystem for microcapillary electrophoresis. / Chan, Vick Chuen; Carles, Maria; Sucher, Nikolaus J.; Wong, Man; Zohar, Yitshak.

In: Journal of Micromechanics and Microengineering, Vol. 13, No. 6, 11.2003, p. 914-921.

Research output: Contribution to journalArticle

Chan, Vick Chuen ; Carles, Maria ; Sucher, Nikolaus J. ; Wong, Man ; Zohar, Yitshak. / Design and fabrication of an integrated microsystem for microcapillary electrophoresis. In: Journal of Micromechanics and Microengineering. 2003 ; Vol. 13, No. 6. pp. 914-921.
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