Design and fabrication of an integrated microsystem for microcapillary electrophoresis

Vick Chuen Chan, Maria Carles, Nikolaus J. Sucher, Man Wong, Yitshak Zohar

Research output: Contribution to journalArticle

30 Scopus citations

Abstract

A capillary electrophoresis microsystem integrated with feed-through platinum electrodes was designed and fabricated for the separation of DNA fragments. A novel glass-to-silicon bonding technology, which allows anodic bonding of a glass wafer to a silicon wafer coated with a thick dielectric film by the inclusion of a thin intermediate amorphous silicon layer, was developed and employed to construct the microsystem. Despite the existence of a thick insulating material and non-uniform topography, robust devices without fluid leakage were obtained. Electrophoretic manipulation and separation of DNA fragments after capillary pre-treatment have been demonstrated and several operational considerations are discussed. The system performance suggests that silicon-based microsystems can be advantageous and practical for the fabrication of integrated microcapillary electrophoresis devices.

Original languageEnglish (US)
Pages (from-to)914-921
Number of pages8
JournalJournal of Micromechanics and Microengineering
Volume13
Issue number6
DOIs
StatePublished - Nov 1 2003
Externally publishedYes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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