Design and fabrication of an integrated programmable floating-gate microphone

Tengge Ma, Tsz Yin Man, Yick Chuen Chan, Yitshak Zohar, Man Wong

Research output: Contribution to conferencePaperpeer-review

23 Scopus citations

Abstract

An integrated, programmable floating-gate capacitive microphone has been designed and fabricated. The conducting floating-gate is electrically insulated and is "programmed" by injecting electrons into it using Flower-Nordheim tunneling through a thin silicon dioxide film, thus capable of simulating an electret and generating a permanent electric field. A current-driving buffer based on metal-oxide-semiconductor field-effect transistors is integrated to reduce the capacitive loading of the microphone. The fabrication process is MOS compatible and promises the potential of integrating a variety of signal processing electronic circuits.

Original languageEnglish (US)
Pages288-291
Number of pages4
StatePublished - Jan 1 2002
Externally publishedYes
Event15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002 - Las Vegas, NV, United States
Duration: Jan 20 2002Jan 24 2002

Other

Other15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002
CountryUnited States
CityLas Vegas, NV
Period1/20/021/24/02

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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