Design and implementation of an integrated floating-gate electrostatic power micro-generator

Wei Ma, Libor Rufer, Yitshak Zohar, Man Wong

Research output: Chapter in Book/Report/Conference proceedingConference contribution

10 Scopus citations

Abstract

The design, modeling and implementation of a single-wafer integrated floating-gate electrostatic power micro-generator are described. Both linear and non-linear models are developed. Realized using a standard CMOS floating-gate process and a CMOS-compatible photo-resist molded electroplating process, the generator contains an electromechanical resonator for energy generation/conversion and electronic devices for "programming" and rectification. Good agreement between modeling and measurement results was obtained.

Original languageEnglish (US)
Title of host publicationTRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
Pages299-302
Number of pages4
StatePublished - Nov 9 2005
Event13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of
Duration: Jun 5 2005Jun 9 2005

Publication series

NameDigest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Volume1

Other

Other13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
CountryKorea, Republic of
CitySeoul
Period6/5/056/9/05

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Keywords

  • Electroplating
  • Electrostatic MEMS device
  • Energy scavenging
  • Post-CMOS
  • Power generator

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Ma, W., Rufer, L., Zohar, Y., & Wong, M. (2005). Design and implementation of an integrated floating-gate electrostatic power micro-generator. In TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers (pp. 299-302). [2A2.3] (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05; Vol. 1).