Design aspects of waveguide hybrid advanced MEMS(WHAM)

Jaisoon Kim, Thomas D Milster

Research output: Chapter in Book/Report/Conference proceedingConference contribution

9 Citations (Scopus)

Abstract

Three different versions of high numerical aperture (NAi =1.9) 0.3 ° field diffraction limited WHAM lens systems are designed for hi-density data storage by using over-hemi-cylinder surfaces. A prototype WHAM lens with NAi = 1.23 is also discussed. Detail of unique tolerance issue is presented.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsT. Hurst, S. Kobayashi
Pages447-456
Number of pages10
Volume4342
DOIs
StatePublished - 2002
EventOptical Data Storage 2001 - Santa Fe,NM, United States
Duration: Apr 22 2001Apr 25 2001

Other

OtherOptical Data Storage 2001
CountryUnited States
CitySanta Fe,NM
Period4/22/014/25/01

Fingerprint

microelectromechanical systems
MEMS
Lenses
Waveguides
lenses
waveguides
numerical aperture
data storage
Diffraction
prototypes
Data storage equipment
diffraction

Keywords

  • Waveguide hybrid advance MEMS lens hi-density data storage

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Kim, J., & Milster, T. D. (2002). Design aspects of waveguide hybrid advanced MEMS(WHAM). In T. Hurst, & S. Kobayashi (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 4342, pp. 447-456) https://doi.org/10.1117/12.453420

Design aspects of waveguide hybrid advanced MEMS(WHAM). / Kim, Jaisoon; Milster, Thomas D.

Proceedings of SPIE - The International Society for Optical Engineering. ed. / T. Hurst; S. Kobayashi. Vol. 4342 2002. p. 447-456.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Kim, J & Milster, TD 2002, Design aspects of waveguide hybrid advanced MEMS(WHAM). in T Hurst & S Kobayashi (eds), Proceedings of SPIE - The International Society for Optical Engineering. vol. 4342, pp. 447-456, Optical Data Storage 2001, Santa Fe,NM, United States, 4/22/01. https://doi.org/10.1117/12.453420
Kim J, Milster TD. Design aspects of waveguide hybrid advanced MEMS(WHAM). In Hurst T, Kobayashi S, editors, Proceedings of SPIE - The International Society for Optical Engineering. Vol. 4342. 2002. p. 447-456 https://doi.org/10.1117/12.453420
Kim, Jaisoon ; Milster, Thomas D. / Design aspects of waveguide hybrid advanced MEMS(WHAM). Proceedings of SPIE - The International Society for Optical Engineering. editor / T. Hurst ; S. Kobayashi. Vol. 4342 2002. pp. 447-456
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