Design aspects of waveguide hybrid advanced MEMS(WHAM)

Jaisoon Kim, Tom D. Milster

Research output: Contribution to journalArticle

9 Scopus citations

Abstract

Three different versions of high numerical aperture (NAi =1.9) 0.3 ° field diffraction limited WHAM lens systems are designed for hi-density data storage by using over-hemi-cylinder surfaces. A prototype WHAM lens with NAi = 1.23 is also discussed. Detail of unique tolerance issue is presented

Original languageEnglish (US)
Pages (from-to)447-456
Number of pages10
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4342
DOIs
StatePublished - Jan 1 2002

Keywords

  • Waveguide hybrid advance MEMS lens hi-density data storage

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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