Design considerations in a novel fiber-coupled three degree-of-freedom displacement interferometer

Steven R. Gillmer, Jonathan D. Ellis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Optomechanical design considerations are presented in the development of a fiber-delivered three degree-offreedom displacement measuring interferometer. The tool can be used to simultaneously calibrate the linear motion and rotational errors of a translating stage using a single measurement beam incident on a plane mirror target. This novel interferometer incorporates a quadrant photodiode to measure four spatially separated interference signals all within a single optical interference beam, otherwise known as differential wavefront sensing. In post processing, a weighted phase average is created over symmetrically adjacent pairings of detector elements to decouple and measure displacement and changes in pitch and yaw. Design considerations include a custom displacement interferometer architecture, mechanical analyses and qualification testing of a working prototype. This interferometer has the potential for providing multi-DOF calibrations for precision motion stages.

Original languageEnglish (US)
Title of host publicationOptomechanical Engineering 2013
DOIs
StatePublished - Dec 1 2013
Externally publishedYes
EventOptomechanical Engineering 2013 - San Diego, CA, United States
Duration: Aug 26 2013Aug 29 2013

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume8836
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

ConferenceOptomechanical Engineering 2013
CountryUnited States
CitySan Diego, CA
Period8/26/138/29/13

Keywords

  • interferometry
  • optical metrology
  • optomechanical design
  • optomechanics

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • Cite this

    Gillmer, S. R., & Ellis, J. D. (2013). Design considerations in a novel fiber-coupled three degree-of-freedom displacement interferometer. In Optomechanical Engineering 2013 [883604] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8836). https://doi.org/10.1117/12.2023358