Design, fabrication and characterization of whispering-gallery mode miniature sensors

Haiyong Quan, Zhixiong Guo, Lei Xu, Stanley K H Pau

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

In this paper, we present the design, fabrication and characterization of the whispering-gallery mode (WGM) miniature sensors for potential use in biosensing at the nanometer scale. In order to understand and investigate the characteristics of WGM resonances, we designed and fabricated a number of sensors with different dimensions. Each sensor is a micro/nano-structure consisted of a microdisk as the resonating cavity and a micro waveguide for light delivery and collection. In addition to the waveguides having uniform cross-section dimensions, tapered waveguide was also considered in our studies. A simulation model was employed to characterize the EM field and radiation energy density of the designed sensors. The gap effects on WGM resonance in terms of quality factor and full width at half maximum (FWHM) were evaluated. Following the design and characterization, the sensors were fabricated in 1.μm-thick Si 3N 4 film using 248nm optical lithography and conventional silicon IC processing. Top and down SEM measurements of the fabricated sensors were conducted and the data for the sensors in one device are given.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsW.Y.-C. Lai, S. Pau, O.D. Lopez
Pages373-381
Number of pages9
Volume5592
DOIs
StatePublished - 2005
Externally publishedYes
EventNanofabrication: Technologies, Devices, and Applications - Philadelphia, PA, United States
Duration: Oct 25 2004Oct 28 2004

Other

OtherNanofabrication: Technologies, Devices, and Applications
CountryUnited States
CityPhiladelphia, PA
Period10/25/0410/28/04

Fingerprint

Whispering gallery modes
whispering gallery modes
Fabrication
fabrication
sensors
Sensors
Waveguides
waveguides
Photolithography
Full width at half maximum
Q factors
delivery
lithography
flux density
Radiation
Silicon
Scanning electron microscopy
cavities
scanning electron microscopy
cross sections

Keywords

  • Design
  • Measurement
  • Micro/nano-structures
  • Nanofabrication
  • Optical lithography
  • Optical resonance
  • Sensors
  • Simulation
  • Waveguide
  • Whispering-gallery mode

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Quan, H., Guo, Z., Xu, L., & Pau, S. K. H. (2005). Design, fabrication and characterization of whispering-gallery mode miniature sensors. In WY-C. Lai, S. Pau, & O. D. Lopez (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 5592, pp. 373-381). [46] https://doi.org/10.1117/12.571303

Design, fabrication and characterization of whispering-gallery mode miniature sensors. / Quan, Haiyong; Guo, Zhixiong; Xu, Lei; Pau, Stanley K H.

Proceedings of SPIE - The International Society for Optical Engineering. ed. / W.Y.-C. Lai; S. Pau; O.D. Lopez. Vol. 5592 2005. p. 373-381 46.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Quan, H, Guo, Z, Xu, L & Pau, SKH 2005, Design, fabrication and characterization of whispering-gallery mode miniature sensors. in WY-C Lai, S Pau & OD Lopez (eds), Proceedings of SPIE - The International Society for Optical Engineering. vol. 5592, 46, pp. 373-381, Nanofabrication: Technologies, Devices, and Applications, Philadelphia, PA, United States, 10/25/04. https://doi.org/10.1117/12.571303
Quan H, Guo Z, Xu L, Pau SKH. Design, fabrication and characterization of whispering-gallery mode miniature sensors. In Lai WY-C, Pau S, Lopez OD, editors, Proceedings of SPIE - The International Society for Optical Engineering. Vol. 5592. 2005. p. 373-381. 46 https://doi.org/10.1117/12.571303
Quan, Haiyong ; Guo, Zhixiong ; Xu, Lei ; Pau, Stanley K H. / Design, fabrication and characterization of whispering-gallery mode miniature sensors. Proceedings of SPIE - The International Society for Optical Engineering. editor / W.Y.-C. Lai ; S. Pau ; O.D. Lopez. Vol. 5592 2005. pp. 373-381
@inproceedings{5682436b5bd449f6a588bca0f3d9c51a,
title = "Design, fabrication and characterization of whispering-gallery mode miniature sensors",
abstract = "In this paper, we present the design, fabrication and characterization of the whispering-gallery mode (WGM) miniature sensors for potential use in biosensing at the nanometer scale. In order to understand and investigate the characteristics of WGM resonances, we designed and fabricated a number of sensors with different dimensions. Each sensor is a micro/nano-structure consisted of a microdisk as the resonating cavity and a micro waveguide for light delivery and collection. In addition to the waveguides having uniform cross-section dimensions, tapered waveguide was also considered in our studies. A simulation model was employed to characterize the EM field and radiation energy density of the designed sensors. The gap effects on WGM resonance in terms of quality factor and full width at half maximum (FWHM) were evaluated. Following the design and characterization, the sensors were fabricated in 1.μm-thick Si 3N 4 film using 248nm optical lithography and conventional silicon IC processing. Top and down SEM measurements of the fabricated sensors were conducted and the data for the sensors in one device are given.",
keywords = "Design, Measurement, Micro/nano-structures, Nanofabrication, Optical lithography, Optical resonance, Sensors, Simulation, Waveguide, Whispering-gallery mode",
author = "Haiyong Quan and Zhixiong Guo and Lei Xu and Pau, {Stanley K H}",
year = "2005",
doi = "10.1117/12.571303",
language = "English (US)",
volume = "5592",
pages = "373--381",
editor = "W.Y.-C. Lai and S. Pau and O.D. Lopez",
booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",

}

TY - GEN

T1 - Design, fabrication and characterization of whispering-gallery mode miniature sensors

AU - Quan, Haiyong

AU - Guo, Zhixiong

AU - Xu, Lei

AU - Pau, Stanley K H

PY - 2005

Y1 - 2005

N2 - In this paper, we present the design, fabrication and characterization of the whispering-gallery mode (WGM) miniature sensors for potential use in biosensing at the nanometer scale. In order to understand and investigate the characteristics of WGM resonances, we designed and fabricated a number of sensors with different dimensions. Each sensor is a micro/nano-structure consisted of a microdisk as the resonating cavity and a micro waveguide for light delivery and collection. In addition to the waveguides having uniform cross-section dimensions, tapered waveguide was also considered in our studies. A simulation model was employed to characterize the EM field and radiation energy density of the designed sensors. The gap effects on WGM resonance in terms of quality factor and full width at half maximum (FWHM) were evaluated. Following the design and characterization, the sensors were fabricated in 1.μm-thick Si 3N 4 film using 248nm optical lithography and conventional silicon IC processing. Top and down SEM measurements of the fabricated sensors were conducted and the data for the sensors in one device are given.

AB - In this paper, we present the design, fabrication and characterization of the whispering-gallery mode (WGM) miniature sensors for potential use in biosensing at the nanometer scale. In order to understand and investigate the characteristics of WGM resonances, we designed and fabricated a number of sensors with different dimensions. Each sensor is a micro/nano-structure consisted of a microdisk as the resonating cavity and a micro waveguide for light delivery and collection. In addition to the waveguides having uniform cross-section dimensions, tapered waveguide was also considered in our studies. A simulation model was employed to characterize the EM field and radiation energy density of the designed sensors. The gap effects on WGM resonance in terms of quality factor and full width at half maximum (FWHM) were evaluated. Following the design and characterization, the sensors were fabricated in 1.μm-thick Si 3N 4 film using 248nm optical lithography and conventional silicon IC processing. Top and down SEM measurements of the fabricated sensors were conducted and the data for the sensors in one device are given.

KW - Design

KW - Measurement

KW - Micro/nano-structures

KW - Nanofabrication

KW - Optical lithography

KW - Optical resonance

KW - Sensors

KW - Simulation

KW - Waveguide

KW - Whispering-gallery mode

UR - http://www.scopus.com/inward/record.url?scp=16644372510&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=16644372510&partnerID=8YFLogxK

U2 - 10.1117/12.571303

DO - 10.1117/12.571303

M3 - Conference contribution

AN - SCOPUS:16644372510

VL - 5592

SP - 373

EP - 381

BT - Proceedings of SPIE - The International Society for Optical Engineering

A2 - Lai, W.Y.-C.

A2 - Pau, S.

A2 - Lopez, O.D.

ER -