DESIGN OF AN ELECTROSTATIC ION OPTICAL SYSTEM FOR ION BEAM LITHOGRAPHY.

Miklos N Szilagyi, H. Paik, B. Siegel

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish (US)
Title of host publicationProceedings - The Electrochemical Society
PublisherElectrochemical Soc
Pages409-421
Number of pages13
Volume83-2
StatePublished - 1983
Externally publishedYes

Fingerprint

Ion beam lithography
Optical systems
Electrostatics
Ions

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Szilagyi, M. N., Paik, H., & Siegel, B. (1983). DESIGN OF AN ELECTROSTATIC ION OPTICAL SYSTEM FOR ION BEAM LITHOGRAPHY. In Proceedings - The Electrochemical Society (Vol. 83-2, pp. 409-421). Electrochemical Soc.

DESIGN OF AN ELECTROSTATIC ION OPTICAL SYSTEM FOR ION BEAM LITHOGRAPHY. / Szilagyi, Miklos N; Paik, H.; Siegel, B.

Proceedings - The Electrochemical Society. Vol. 83-2 Electrochemical Soc, 1983. p. 409-421.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Szilagyi, MN, Paik, H & Siegel, B 1983, DESIGN OF AN ELECTROSTATIC ION OPTICAL SYSTEM FOR ION BEAM LITHOGRAPHY. in Proceedings - The Electrochemical Society. vol. 83-2, Electrochemical Soc, pp. 409-421.
Szilagyi MN, Paik H, Siegel B. DESIGN OF AN ELECTROSTATIC ION OPTICAL SYSTEM FOR ION BEAM LITHOGRAPHY. In Proceedings - The Electrochemical Society. Vol. 83-2. Electrochemical Soc. 1983. p. 409-421
Szilagyi, Miklos N ; Paik, H. ; Siegel, B. / DESIGN OF AN ELECTROSTATIC ION OPTICAL SYSTEM FOR ION BEAM LITHOGRAPHY. Proceedings - The Electrochemical Society. Vol. 83-2 Electrochemical Soc, 1983. pp. 409-421
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