DESIGN OF AN ELECTROSTATIC ION OPTICAL SYSTEM FOR ION BEAM LITHOGRAPHY.

M. Szilagyi, H. Paik, B. Siegel

Research output: Contribution to conferencePaper

Original languageEnglish (US)
Pages409-421
Number of pages13
StatePublished - Jan 1 1983

ASJC Scopus subject areas

  • Engineering(all)

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