Design of Electro-Thermal Micro-Actuators: Mechanics and Electronic Position Detection

Kalin V. Lazarov, Eniko T Enikov

Research output: Chapter in Book/Report/Conference proceedingChapter

Abstract

This chapter is devoted to the design of electro-thermal micro-actuators with capacitive position feedback. Analytical and finite element solutions of the electro-thermal and thermo-elastic problems are presented. A separate section is devoted to the challenging problem of displacement determination using charge sensitive amplifiers for high-precision capacitance measurements. These are illustrated with examples of electronic measurement circuits tested by the authors.

Original languageEnglish (US)
Title of host publicationCISM International Centre for Mechanical Sciences, Courses and Lectures
PublisherSpringer International Publishing
Pages101-118
Number of pages18
DOIs
StatePublished - Jan 1 2006

Publication series

NameCISM International Centre for Mechanical Sciences, Courses and Lectures
Volume478
ISSN (Print)0254-1971
ISSN (Electronic)2309-3706

Keywords

  • Charge Sensitive Amplifier
  • Operational Amplifier
  • Parasitic Capacitance
  • Peak Detector
  • Thermal Actuator

ASJC Scopus subject areas

  • Mechanical Engineering
  • Mechanics of Materials
  • Computer Science Applications
  • Modeling and Simulation

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