Desorption of moisture from stainless steel tubes and ceramic filters in high purity gas distribution systems

A. Haider, Farhang Shadman

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The mechanism of moisture desorption from both stainless steel and ceramic surfaces is studied. A unique experimental setup was designed and utilized to determine desorption under gas flow conditions by monitoring the moisture concentration at the system outlet. A simple analytical technique that was used to analyze the desorption data so acquired, in an effort to normalize the results and thus make them system independent, is presented. Desorption rate constants for stainless steel and ceramic (85% alumina) surfaces are calculated using this model at a constant temperature.

Original languageEnglish (US)
Title of host publication1990 Proceedings, IEEE/CHMT Ninth International Electronic Manufacturing Technology Symposium
PublisherPubl by IEEE
Pages162-165
Number of pages4
StatePublished - 1990
EventNinth IEEE/CHMT International Electronics Manufacturing Technology Symposium - Washington, DC, USA
Duration: Oct 1 1990Oct 3 1990

Other

OtherNinth IEEE/CHMT International Electronics Manufacturing Technology Symposium
CityWashington, DC, USA
Period10/1/9010/3/90

Fingerprint

Desorption
Moisture
Stainless steel
Gases
Flow of gases
Rate constants
Alumina
Monitoring
Temperature

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Haider, A., & Shadman, F. (1990). Desorption of moisture from stainless steel tubes and ceramic filters in high purity gas distribution systems. In 1990 Proceedings, IEEE/CHMT Ninth International Electronic Manufacturing Technology Symposium (pp. 162-165). Publ by IEEE.

Desorption of moisture from stainless steel tubes and ceramic filters in high purity gas distribution systems. / Haider, A.; Shadman, Farhang.

1990 Proceedings, IEEE/CHMT Ninth International Electronic Manufacturing Technology Symposium. Publ by IEEE, 1990. p. 162-165.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Haider, A & Shadman, F 1990, Desorption of moisture from stainless steel tubes and ceramic filters in high purity gas distribution systems. in 1990 Proceedings, IEEE/CHMT Ninth International Electronic Manufacturing Technology Symposium. Publ by IEEE, pp. 162-165, Ninth IEEE/CHMT International Electronics Manufacturing Technology Symposium, Washington, DC, USA, 10/1/90.
Haider A, Shadman F. Desorption of moisture from stainless steel tubes and ceramic filters in high purity gas distribution systems. In 1990 Proceedings, IEEE/CHMT Ninth International Electronic Manufacturing Technology Symposium. Publ by IEEE. 1990. p. 162-165
Haider, A. ; Shadman, Farhang. / Desorption of moisture from stainless steel tubes and ceramic filters in high purity gas distribution systems. 1990 Proceedings, IEEE/CHMT Ninth International Electronic Manufacturing Technology Symposium. Publ by IEEE, 1990. pp. 162-165
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