Desorption of moisture from stainless steel tubes and ceramic filters in high purity gas distribution systems

A. Haider, F. Shadman

Research output: Contribution to conferencePaperpeer-review

Abstract

The mechanism of moisture desorption from both stainless steel and ceramic surfaces is studied. A unique experimental setup was designed and utilized to determine desorption under gas flow conditions by monitoring the moisture concentration at the system outlet. A simple analytical technique that was used to analyze the desorption data so acquired, in an effort to normalize the results and thus make them system independent, is presented. Desorption rate constants for stainless steel and ceramic (85% alumina) surfaces are calculated using this model at a constant temperature.

Original languageEnglish (US)
Pages162-165
Number of pages4
StatePublished - Dec 1 1990
EventNinth IEEE/CHMT International Electronics Manufacturing Technology Symposium - Washington, DC, USA
Duration: Oct 1 1990Oct 3 1990

Other

OtherNinth IEEE/CHMT International Electronics Manufacturing Technology Symposium
CityWashington, DC, USA
Period10/1/9010/3/90

ASJC Scopus subject areas

  • Engineering(all)

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