Detection of HO2•/O2•- radicals formed in aqueous solutions irradiated with megasonic waves using a cavitation threshold (CT) cell set-up

Zhen Xing Han, Bing Wu, Ian Brown, Srini Raghavan, Srini Raghavan

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations
Original languageEnglish (US)
Title of host publicationUltra Clean Processing of Semiconductor Surfaces XII
EditorsPaul W. Mertens, Marc Meuris, Marc Heyns, Marc Meuris, Marc Heyns
PublisherTrans Tech Publications Ltd
Pages170-173
Number of pages4
ISBN (Electronic)9783038352426
DOIs
StatePublished - 2015
Event12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces, UCPSS 2014 - Brussels, Belgium
Duration: Sep 21 2014Sep 24 2014

Publication series

NameSolid State Phenomena
Volume219
ISSN (Print)1012-0394
ISSN (Electronic)1662-9779

Other

Other12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces, UCPSS 2014
Country/TerritoryBelgium
CityBrussels
Period9/21/149/24/14

Keywords

  • CT cell
  • Chemiluminescence (CL)
  • Hydroperoxyl Radicals
  • MCLA
  • Megasonics

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Materials Science(all)
  • Condensed Matter Physics

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