Determining the Charge Properties of Reoxidized, Lightly Nitrided Oxides Using Surface Charge Analysis

Ara Philipossian, D. B. Jackson

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

The changes in charge properties such as total fixed charge and interface state density as a result of nitridation and reoxidation of ultra-thin thermally grown oxides have been measured using a commercially available, optically based technique known as surface charge analysis (SCA). Charge data regarding both nitridation and reoxidation are consistent with those found in the literature thus indicating that SCA can be a viable tool for rapid and real-time analysis of the charge properties of ultrathin RNO dielectrics. The results further indicate that, when reoxidation time is larger than the nitridation time, total fixed charge during reoxidation of nitrided oxides obeys a universal curve which depends only on the ratio of reoxidation time to nitridation time. This is consistent with the previously reported universal curve concerning the growth rate during reoxidation of nitrided samples. When the ratio is as high as six, the recovery appears to be nearly complete and almost identical to the total fixed charge for the initial oxide prior to nitridation. As for interface state density, no such dependence is observed.

Original languageEnglish (US)
Pages (from-to)L68-L71
JournalJournal of the Electrochemical Society
Volume140
Issue number4
DOIs
StatePublished - 1993
Externally publishedYes

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Nitridation
Surface charge
Oxides
oxides
Interface states
curves
recovery
Recovery

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Renewable Energy, Sustainability and the Environment
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Materials Chemistry
  • Electrochemistry

Cite this

Determining the Charge Properties of Reoxidized, Lightly Nitrided Oxides Using Surface Charge Analysis. / Philipossian, Ara; Jackson, D. B.

In: Journal of the Electrochemical Society, Vol. 140, No. 4, 1993, p. L68-L71.

Research output: Contribution to journalArticle

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