Development of a portable deflectometry system for high spatial resolution surface measurements

Alejandro V. Maldonado, Peng Su, James H Burge

Research output: Contribution to journalArticle

16 Citations (Scopus)

Abstract

The Slope-Measuring Portable Optical Test System (SPOTS) is a new, portable, high-resolution, deflectometry device that achieves mid to high (20 to 1000 cyc/m) spatial frequency optical surface metrology with very little filtering and very little noise. Using a proof of concept system, we achieved 1 nm RMS surface accuracy for mid to high spatial frequencies, and 300 nrad RMS slope precision. SPOTS offers a turnkey solution for measuring errors on a wide variety of optical surfaces including the large mirrors fabricated at The University of Arizona. This paper defines and discusses SPOTS, including the principles of operation, measurement modes, design, performance, error analysis, and experimental results.

Original languageEnglish (US)
Pages (from-to)4023-4032
Number of pages10
JournalApplied Optics
Issue number18
DOIs
StatePublished - Jun 20 2014

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Surface measurement
spatial resolution
high resolution
slopes
Error analysis
error analysis
metrology
mirrors

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

Cite this

Development of a portable deflectometry system for high spatial resolution surface measurements. / Maldonado, Alejandro V.; Su, Peng; Burge, James H.

In: Applied Optics, No. 18, 20.06.2014, p. 4023-4032.

Research output: Contribution to journalArticle

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