Development of fully depleted scientific CCD's for astronomy

Kasey Boggs, Richard Bredthauer, Michael Lesser

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Due to aggressive scientific specifications, Semiconductor Technology Associates and the University of Arizona's Imaging Technology Laboratory have collaborated to develop a fully depleted back illuminated CCD for scientific imaging. These devices are designed to target increased quantum efficiency into the near-infrared, without reduction in the modulation transfer function, charge transfer efficiency, or rms noise. The STA1700 series imagers are back illuminated 100 micron thick devices with a 10 micron pixel pitch targeted to meet the requirements of the Large Synoptic Survey Telescope (LSST). Recent characterization results will be presented including the point spread function of a 2 micron spot. Also discussed will be the thinning and packaging developments for the STA1700. These efforts include the addition of a backside bias contact, invar package design with high density connectors, as well as etching and backside coating optimization for high resistivity silicon.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE-IS and T Electronic Imaging - Sensors, Cameras, and Systems for Scientific/Industrial Applications VIII
StatePublished - Aug 31 2007
EventSensors, Cameras, and Systems for Scientific/Industrial Applications VIII - San Jose, CA, United States
Duration: Jan 30 2007Feb 1 2007

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume6501
ISSN (Print)0277-786X

Other

OtherSensors, Cameras, and Systems for Scientific/Industrial Applications VIII
CountryUnited States
CitySan Jose, CA
Period1/30/072/1/07

Keywords

  • Charge transfer efficiency
  • Point spread function
  • RMS noise

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • Cite this

    Boggs, K., Bredthauer, R., & Lesser, M. (2007). Development of fully depleted scientific CCD's for astronomy. In Proceedings of SPIE-IS and T Electronic Imaging - Sensors, Cameras, and Systems for Scientific/Industrial Applications VIII [650106] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6501).