Development of fully depleted scientific CCD's for astronomy

Kasey Boggs, Richard Bredthauer, Michael P Lesser

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Due to aggressive scientific specifications, Semiconductor Technology Associates and the University of Arizona's Imaging Technology Laboratory have collaborated to develop a fully depleted back illuminated CCD for scientific imaging. These devices are designed to target increased quantum efficiency into the near-infrared, without reduction in the modulation transfer function, charge transfer efficiency, or rms noise. The STA1700 series imagers are back illuminated 100 micron thick devices with a 10 micron pixel pitch targeted to meet the requirements of the Large Synoptic Survey Telescope (LSST). Recent characterization results will be presented including the point spread function of a 2 micron spot. Also discussed will be the thinning and packaging developments for the STA1700. These efforts include the addition of a backside bias contact, invar package design with high density connectors, as well as etching and backside coating optimization for high resistivity silicon.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
Volume6501
StatePublished - 2007
EventSensors, Cameras, and Systems for Scientific/Industrial Applications VIII - San Jose, CA, United States
Duration: Jan 30 2007Feb 1 2007

Other

OtherSensors, Cameras, and Systems for Scientific/Industrial Applications VIII
CountryUnited States
CitySan Jose, CA
Period1/30/072/1/07

Fingerprint

Astronomy
Optical transfer function
astronomy
Charge coupled devices
charge coupled devices
Imaging techniques
connectors
modulation transfer function
point spread functions
Quantum efficiency
Image sensors
packaging
Telescopes
Charge transfer
quantum efficiency
specifications
Etching
Packaging
Pixels
pixels

Keywords

  • Charge transfer efficiency
  • Point spread function
  • RMS noise

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Boggs, K., Bredthauer, R., & Lesser, M. P. (2007). Development of fully depleted scientific CCD's for astronomy. In Proceedings of SPIE - The International Society for Optical Engineering (Vol. 6501). [650106]

Development of fully depleted scientific CCD's for astronomy. / Boggs, Kasey; Bredthauer, Richard; Lesser, Michael P.

Proceedings of SPIE - The International Society for Optical Engineering. Vol. 6501 2007. 650106.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Boggs, K, Bredthauer, R & Lesser, MP 2007, Development of fully depleted scientific CCD's for astronomy. in Proceedings of SPIE - The International Society for Optical Engineering. vol. 6501, 650106, Sensors, Cameras, and Systems for Scientific/Industrial Applications VIII, San Jose, CA, United States, 1/30/07.
Boggs K, Bredthauer R, Lesser MP. Development of fully depleted scientific CCD's for astronomy. In Proceedings of SPIE - The International Society for Optical Engineering. Vol. 6501. 2007. 650106
Boggs, Kasey ; Bredthauer, Richard ; Lesser, Michael P. / Development of fully depleted scientific CCD's for astronomy. Proceedings of SPIE - The International Society for Optical Engineering. Vol. 6501 2007.
@inproceedings{c13478f0bdbe4d5eac0601ef2ac714f6,
title = "Development of fully depleted scientific CCD's for astronomy",
abstract = "Due to aggressive scientific specifications, Semiconductor Technology Associates and the University of Arizona's Imaging Technology Laboratory have collaborated to develop a fully depleted back illuminated CCD for scientific imaging. These devices are designed to target increased quantum efficiency into the near-infrared, without reduction in the modulation transfer function, charge transfer efficiency, or rms noise. The STA1700 series imagers are back illuminated 100 micron thick devices with a 10 micron pixel pitch targeted to meet the requirements of the Large Synoptic Survey Telescope (LSST). Recent characterization results will be presented including the point spread function of a 2 micron spot. Also discussed will be the thinning and packaging developments for the STA1700. These efforts include the addition of a backside bias contact, invar package design with high density connectors, as well as etching and backside coating optimization for high resistivity silicon.",
keywords = "Charge transfer efficiency, Point spread function, RMS noise",
author = "Kasey Boggs and Richard Bredthauer and Lesser, {Michael P}",
year = "2007",
language = "English (US)",
isbn = "081946614X",
volume = "6501",
booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",

}

TY - GEN

T1 - Development of fully depleted scientific CCD's for astronomy

AU - Boggs, Kasey

AU - Bredthauer, Richard

AU - Lesser, Michael P

PY - 2007

Y1 - 2007

N2 - Due to aggressive scientific specifications, Semiconductor Technology Associates and the University of Arizona's Imaging Technology Laboratory have collaborated to develop a fully depleted back illuminated CCD for scientific imaging. These devices are designed to target increased quantum efficiency into the near-infrared, without reduction in the modulation transfer function, charge transfer efficiency, or rms noise. The STA1700 series imagers are back illuminated 100 micron thick devices with a 10 micron pixel pitch targeted to meet the requirements of the Large Synoptic Survey Telescope (LSST). Recent characterization results will be presented including the point spread function of a 2 micron spot. Also discussed will be the thinning and packaging developments for the STA1700. These efforts include the addition of a backside bias contact, invar package design with high density connectors, as well as etching and backside coating optimization for high resistivity silicon.

AB - Due to aggressive scientific specifications, Semiconductor Technology Associates and the University of Arizona's Imaging Technology Laboratory have collaborated to develop a fully depleted back illuminated CCD for scientific imaging. These devices are designed to target increased quantum efficiency into the near-infrared, without reduction in the modulation transfer function, charge transfer efficiency, or rms noise. The STA1700 series imagers are back illuminated 100 micron thick devices with a 10 micron pixel pitch targeted to meet the requirements of the Large Synoptic Survey Telescope (LSST). Recent characterization results will be presented including the point spread function of a 2 micron spot. Also discussed will be the thinning and packaging developments for the STA1700. These efforts include the addition of a backside bias contact, invar package design with high density connectors, as well as etching and backside coating optimization for high resistivity silicon.

KW - Charge transfer efficiency

KW - Point spread function

KW - RMS noise

UR - http://www.scopus.com/inward/record.url?scp=34548251401&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=34548251401&partnerID=8YFLogxK

M3 - Conference contribution

SN - 081946614X

SN - 9780819466143

VL - 6501

BT - Proceedings of SPIE - The International Society for Optical Engineering

ER -