Diamond disc diagnostic method based on "dry" coefficient of friction measurements

Anand Meled, Yasa Sampurno, Fransisca Sudargho, Yun Zhuang, Ara Philipossian

Research output: Contribution to journalArticle

Abstract

A method for determining the dry coefficient of friction (COF) of chemical mechanical planarization conditioner discs for purposes of quality assessment and problem diagnostics was presented. First, two "known good" (K1 and K2) and one "known bad" (K3) diamond discs were characterized. Results showed that the COF of K3 was significantly higher than K1 and K2 thus suggesting that the COF can be potentially used as a screening metric for disc quality. Second, the study confirmed the existence of a correlation between dry COF and the total area of the furrows generated by the active diamonds such that the COF increased with the total area of the furrows.

Original languageEnglish (US)
Pages (from-to)H457-H459
JournalElectrochemical and Solid-State Letters
Volume13
Issue number12
DOIs
StatePublished - Oct 29 2010

ASJC Scopus subject areas

  • Chemical Engineering(all)
  • Materials Science(all)
  • Physical and Theoretical Chemistry
  • Electrochemistry
  • Electrical and Electronic Engineering

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