Diamond disc diagnostic method based on "dry" coefficient of friction measurements

Anand Meled, Yasa Sampurno, Fransisca Sudargho, Yun Zhuang, Ara Philipossian

Research output: Contribution to journalArticle

Abstract

A method for determining the dry coefficient of friction (COF) of chemical mechanical planarization conditioner discs for purposes of quality assessment and problem diagnostics was presented. First, two "known good" (K1 and K2) and one "known bad" (K3) diamond discs were characterized. Results showed that the COF of K3 was significantly higher than K1 and K2 thus suggesting that the COF can be potentially used as a screening metric for disc quality. Second, the study confirmed the existence of a correlation between dry COF and the total area of the furrows generated by the active diamonds such that the COF increased with the total area of the furrows.

Original languageEnglish (US)
JournalElectrochemical and Solid-State Letters
Volume13
Issue number12
DOIs
StatePublished - 2010

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friction measurement
Diamond
coefficient of friction
Diamonds
diamonds
Friction
Chemical mechanical polishing
Screening
screening

ASJC Scopus subject areas

  • Electrochemistry
  • Electrical and Electronic Engineering
  • Materials Science(all)
  • Chemical Engineering(all)
  • Physical and Theoretical Chemistry

Cite this

Diamond disc diagnostic method based on "dry" coefficient of friction measurements. / Meled, Anand; Sampurno, Yasa; Sudargho, Fransisca; Zhuang, Yun; Philipossian, Ara.

In: Electrochemical and Solid-State Letters, Vol. 13, No. 12, 2010.

Research output: Contribution to journalArticle

Meled, Anand ; Sampurno, Yasa ; Sudargho, Fransisca ; Zhuang, Yun ; Philipossian, Ara. / Diamond disc diagnostic method based on "dry" coefficient of friction measurements. In: Electrochemical and Solid-State Letters. 2010 ; Vol. 13, No. 12.
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