Dielectric and ferroelectric characterization of sol-gel derived Ca-doped PbTiO3 thin films

G. Teowee, K. C. McCarthy, E. K. Franke, J. M. Boulton, T. P. Alexander, T. J. Bukowski, Donald R Uhlmann

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations

Abstract

A series of sol-gel derived CaTiO3-PbTiO3 thin films (i.e. Pb1-xCaxTiO3 with x = 0-1) was prepared on platinized Si substrates and fired to temperatures ranging from 550 °C to 650 °C. Multiple spincoating was performed to obtain films up to 0.5 μm thick with an intermediate firing of 400 °C between coatings. After the final crystallization firing, top Pt electrodes were sputtered to form monolithic capacitors. These capacitors were subjected to dielectric and ferroelectric characterization using an impedance analyzer and Radiant Technology RT66A Ferroelectric Test System. XRD was used to study the phase development and phase assembly of the fired films. All compositions were single perovskite phase after firing to 600 °C. The effects of Ca content on the crystallization behavior and ferroelectric properties are discussed.

Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposium - Proceedings
PublisherMaterials Research Society
Pages431-436
Number of pages6
Volume433
Publication statusPublished - 1996
Externally publishedYes
EventProceedings of the 1996 MRS Spring Symposium - San Francisco, CA, USA
Duration: Apr 7 1996Apr 12 1996

Other

OtherProceedings of the 1996 MRS Spring Symposium
CitySan Francisco, CA, USA
Period4/7/964/12/96

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ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Teowee, G., McCarthy, K. C., Franke, E. K., Boulton, J. M., Alexander, T. P., Bukowski, T. J., & Uhlmann, D. R. (1996). Dielectric and ferroelectric characterization of sol-gel derived Ca-doped PbTiO3 thin films. In Materials Research Society Symposium - Proceedings (Vol. 433, pp. 431-436). Materials Research Society.