Diffraction effects for interferometric measurements due to imaging aberrations

Ping Zhou, Chunyu Zhao, Jim Burge

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Aspheric surfaces are often measured using interferometers with null correctors. The null corrector creates a wavefront that matches the surface under test, but also introduces imaging aberrations, such as mapping distortion and field curvature. These imaging aberrations cause high frequency features in the surface under test to be filtered out and create artifacts at edges. We provide a concise methodology for analyzing these effects using field curvatures, and showing how they couple with diffraction as represented by the Talbot effect and Fresnel edge diffraction.

Original languageEnglish (US)
Title of host publicationInterferometry XVI
Subtitle of host publicationTechniques and Analysis
DOIs
StatePublished - Dec 1 2012
EventInterferometry XVI: Techniques and Analysis - San Diego, CA, United States
Duration: Aug 13 2012Aug 15 2012

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume8493
ISSN (Print)0277-786X

Other

OtherInterferometry XVI: Techniques and Analysis
CountryUnited States
CitySan Diego, CA
Period8/13/128/15/12

Keywords

  • Diffraction
  • Edge diffraction
  • Imaging aberrations
  • Interferometry
  • Phase smoothing
  • Talbot effect

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • Cite this

    Zhou, P., Zhao, C., & Burge, J. (2012). Diffraction effects for interferometric measurements due to imaging aberrations. In Interferometry XVI: Techniques and Analysis [84930D] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8493). https://doi.org/10.1117/12.930104