Diffraction effects for interferometric measurements due to imaging aberrations

Ping Zhou, Yong Shu, Chunyu Zhao, James H Burge

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

Aspheric surfaces are often measured using interferometers with null correctors, either refractive or diffractive. The use of null correctors allows high accuracy in the measurement, but also introduces imaging aberrations, such as mapping distortion and field curvature. These imaging aberrations couple with diffraction effects and limit the accuracy of the measurements, causing high frequency features in the surface under test to be filtered out and creating artifacts near boundaries, especially at edges. We provide a concise methodology for analyzing these effects using the astigmatic field curves to define the aberration, and showing how this couples with diffraction as represented by the Talbot effect and Fresnel edge diffraction. The resulting relationships are validated with both computer simulations and direct measurements from an interferometer with CGH null corrector.

Original languageEnglish (US)
Pages (from-to)4403-4418
Number of pages16
JournalOptics Express
Volume20
Issue number4
DOIs
StatePublished - Feb 13 2012

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aberration
interferometers
diffraction
artifacts
computerized simulation
curvature
methodology
curves

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

Cite this

Diffraction effects for interferometric measurements due to imaging aberrations. / Zhou, Ping; Shu, Yong; Zhao, Chunyu; Burge, James H.

In: Optics Express, Vol. 20, No. 4, 13.02.2012, p. 4403-4418.

Research output: Contribution to journalArticle

@article{40a016b171aa4d3890134c27bf3d1d12,
title = "Diffraction effects for interferometric measurements due to imaging aberrations",
abstract = "Aspheric surfaces are often measured using interferometers with null correctors, either refractive or diffractive. The use of null correctors allows high accuracy in the measurement, but also introduces imaging aberrations, such as mapping distortion and field curvature. These imaging aberrations couple with diffraction effects and limit the accuracy of the measurements, causing high frequency features in the surface under test to be filtered out and creating artifacts near boundaries, especially at edges. We provide a concise methodology for analyzing these effects using the astigmatic field curves to define the aberration, and showing how this couples with diffraction as represented by the Talbot effect and Fresnel edge diffraction. The resulting relationships are validated with both computer simulations and direct measurements from an interferometer with CGH null corrector.",
author = "Ping Zhou and Yong Shu and Chunyu Zhao and Burge, {James H}",
year = "2012",
month = "2",
day = "13",
doi = "10.1364/OE.20.004403",
language = "English (US)",
volume = "20",
pages = "4403--4418",
journal = "Optics Express",
issn = "1094-4087",
publisher = "The Optical Society",
number = "4",

}

TY - JOUR

T1 - Diffraction effects for interferometric measurements due to imaging aberrations

AU - Zhou, Ping

AU - Shu, Yong

AU - Zhao, Chunyu

AU - Burge, James H

PY - 2012/2/13

Y1 - 2012/2/13

N2 - Aspheric surfaces are often measured using interferometers with null correctors, either refractive or diffractive. The use of null correctors allows high accuracy in the measurement, but also introduces imaging aberrations, such as mapping distortion and field curvature. These imaging aberrations couple with diffraction effects and limit the accuracy of the measurements, causing high frequency features in the surface under test to be filtered out and creating artifacts near boundaries, especially at edges. We provide a concise methodology for analyzing these effects using the astigmatic field curves to define the aberration, and showing how this couples with diffraction as represented by the Talbot effect and Fresnel edge diffraction. The resulting relationships are validated with both computer simulations and direct measurements from an interferometer with CGH null corrector.

AB - Aspheric surfaces are often measured using interferometers with null correctors, either refractive or diffractive. The use of null correctors allows high accuracy in the measurement, but also introduces imaging aberrations, such as mapping distortion and field curvature. These imaging aberrations couple with diffraction effects and limit the accuracy of the measurements, causing high frequency features in the surface under test to be filtered out and creating artifacts near boundaries, especially at edges. We provide a concise methodology for analyzing these effects using the astigmatic field curves to define the aberration, and showing how this couples with diffraction as represented by the Talbot effect and Fresnel edge diffraction. The resulting relationships are validated with both computer simulations and direct measurements from an interferometer with CGH null corrector.

UR - http://www.scopus.com/inward/record.url?scp=84857267935&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84857267935&partnerID=8YFLogxK

U2 - 10.1364/OE.20.004403

DO - 10.1364/OE.20.004403

M3 - Article

VL - 20

SP - 4403

EP - 4418

JO - Optics Express

JF - Optics Express

SN - 1094-4087

IS - 4

ER -