Diffraction effects for interferometric measurements due to imaging aberrations

Ping Zhou, Yong Shu, Chunyu Zhao, Jim H. Burge

Research output: Contribution to journalArticle

4 Scopus citations

Abstract

Aspheric surfaces are often measured using interferometers with null correctors, either refractive or diffractive. The use of null correctors allows high accuracy in the measurement, but also introduces imaging aberrations, such as mapping distortion and field curvature. These imaging aberrations couple with diffraction effects and limit the accuracy of the measurements, causing high frequency features in the surface under test to be filtered out and creating artifacts near boundaries, especially at edges. We provide a concise methodology for analyzing these effects using the astigmatic field curves to define the aberration, and showing how this couples with diffraction as represented by the Talbot effect and Fresnel edge diffraction. The resulting relationships are validated with both computer simulations and direct measurements from an interferometer with CGH null corrector.

Original languageEnglish (US)
Pages (from-to)4403-4418
Number of pages16
JournalOptics Express
Volume20
Issue number4
DOIs
StatePublished - Feb 13 2012

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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