Diffraction efficiency characteristics for MEMS-based phase-only spatial light modulator with nonlinear phase distribution

Remington S. Ketchum, Pierre Alexandre Blanche

Research output: Contribution to journalArticlepeer-review

Abstract

Micro-electro mechanical systems (MEMS)-based phase-only spatial light modulators (PLMs) have the potential to overcome the limited speed of liquid crystal on silicon (LCoS) spatial light modulators (SLMs) and operate at speeds faster than 10 kHz. This expands the practicality of PLMs to several applications, including communications, sensing, and high-speed displays. The complex structure and fabrication requirements for large, 2D MEMS arrays with vertical actuation have kept MEMS-based PLMs out of the market in favor of LCoS SLMs. Recently, Texas Instruments has adapted its existing DMD technology for fabricating MEMS-based PLMs. Here, we characterize the diffraction efficiency for one of these PLMs and examine the effect of a nonlinear distribution of addressable phase states across a range of wavelengths and illumination angles.

Original languageEnglish (US)
Article number62
Pages (from-to)1-9
Number of pages9
JournalPhotonics
Volume8
Issue number3
DOIs
StatePublished - Mar 2021

Keywords

  • Diffraction
  • Digital micromirror device
  • Phase light modulation
  • Spatial light modulation

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Instrumentation
  • Radiology Nuclear Medicine and imaging

Fingerprint Dive into the research topics of 'Diffraction efficiency characteristics for MEMS-based phase-only spatial light modulator with nonlinear phase distribution'. Together they form a unique fingerprint.

Cite this