Directed assembly of metal oxide nanobelts with microsystems into integrated nanosensors

Choongho Yu, Qing Hao, Li Shi, Dae Jin Kang, Xiangyang Kong, Z. L. Wang

Research output: Contribution to conferencePaperpeer-review

Abstract

Single-crystalline tin dioxide (SnO2) nanobelts have been assembled with microfabricated suspended heaters as low-power, sensitive gas sensors. With less than 4 mW power consumption of the micro-heater, the nanobelt can be heated up to 500°C. The electrical conductance of the heated nanobelt was found to be highly stable and sensitive to toxic and inflammable gas species including dimethyl methyl phosphonate (DMMP), nitrogen dioxide (NO2), and ethanol. The experiment is a step towards the large scale integration of nanomaterials with microsystems, and such integration via a directed assembly approach can potentially enable the fabrication of low-power, sensitive, and selective integrated nanosensor systems.

Original languageEnglish (US)
Pages543-547
Number of pages5
DOIs
StatePublished - 2004
Externally publishedYes
Event2004 ASME International Mechanical Engineering Congress and Exposition, IMECE 2004 - Anaheim, CA, United States
Duration: Nov 13 2004Nov 19 2004

Other

Other2004 ASME International Mechanical Engineering Congress and Exposition, IMECE 2004
CountryUnited States
CityAnaheim, CA
Period11/13/0411/19/04

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

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