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Research output: Contribution to journalArticle

Original languageEnglish (US)
Article number7310649
Pages (from-to)443
Number of pages1
JournalIEEE Transactions on Semiconductor Manufacturing
Volume28
Issue number4
DOIs
StatePublished - Nov 1 2015

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Industrial and Manufacturing Engineering
  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials

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