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Original languageEnglish (US)
Article number8066418
Pages (from-to)313
Number of pages1
JournalIEEE Transactions on Semiconductor Manufacturing
Volume30
Issue number4
DOIs
StatePublished - Nov 2017

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

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