Ultrapure water systems in semiconductor plants consist of many components. The interactions between these components, including cancellation and synergism, are not generally understood and taken into account. In this study, two important examples of these interactions are investigated: interactions of ultraviolet radiation units (UV) with membrane filters and interactions of UV with ion-exchange units. Both experimental and theoretical techniques are developed to study these interactions. The results indicate that the sequencing of UV and filter units affect the efficiency of total oxidizable carbon (TOC) removal. In particular, the efficiency is higher when filter is before UV rather than after UV. Interaction between UV and ion exchange is also important. A UV treatment before ion exchange is desirable for the removal of recalcitrant, low molecular weight organic compounds such as ethanol, but undesirable for the removal of high molecular weight charged compounds including bacterial lipopolysaccharides, alginic acids, humic acids, methionine, and glycine.
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Industrial and Manufacturing Engineering
- Electrical and Electronic Engineering