Effect of component interactions on the removal of organic impurities in ultrapure water systems

Robert Governal, Alison Bonner, Farhang Shadman

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

The interaction among the components of the ultrapure water systems in semiconductor plants is explored. Two important examples of these interactions are investigated: interactions of ultraviolet (UV) radiation units with membrane filters and interactions of UV with ion-exchange units. Both experimental and theoretical techniques are developed to study these interactions. The results indicate that the sequencing of UV and filter units affect the efficiency of total oxidizable carbon (TOC) removal. In particular, the efficiency is higher when the filter is before UV. Interaction between UV and ion exchange is desirable for the removal of recalcitrant, low-molecular-weight organic compounds such as ethanol, but undesirable for the removal of high-molecular-weight charged compounds such as bacterial lipopolysaccharides, alginic acids, humic acids, methionine, and glycine.

Original languageEnglish (US)
Pages (from-to)298-303
Number of pages6
JournalIEEE Transactions on Semiconductor Manufacturing
Volume4
Issue number4
DOIs
StatePublished - Nov 1991

Fingerprint

Impurities
impurities
Water
Ion exchange
Molecular weight
water
Humic Substances
Alginate
interactions
Organic compounds
filters
Ultraviolet radiation
Methionine
Glycine
Lipopolysaccharides
Amino acids
Ethanol
Carbon
Semiconductor materials
Membranes

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Industrial and Manufacturing Engineering
  • Electronic, Optical and Magnetic Materials
  • Physics and Astronomy (miscellaneous)
  • Condensed Matter Physics

Cite this

Effect of component interactions on the removal of organic impurities in ultrapure water systems. / Governal, Robert; Bonner, Alison; Shadman, Farhang.

In: IEEE Transactions on Semiconductor Manufacturing, Vol. 4, No. 4, 11.1991, p. 298-303.

Research output: Contribution to journalArticle

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