Effect of conditioner disc wear on frictional, thermal, kinetic and pad micro-textural attributes of interlayer dielectric and tungsten chemical mechanical planarization

Juan Cristobal Mariscal, Hossein Dadashazar, Hossein Dadashazar, Jeffrey McAllister, Yasa Sampurno, Yasa Sampurno, Ara Philipossian, Ara Philipossian

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Physics & Astronomy

Engineering & Materials Science