Effect of conditioner type and downforce, and pad break-in time, on pad surface micro-texture in chemical mechanical planarization

Jeffrey McAllister, Calliandra Stuffle, Yasa Sampurno, Dale Hetherington, Jon Sierra Suarez, Leonard Borucki, Ara Philipossian

Research output: Contribution to journalArticle

12 Scopus citations

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Chemical Compounds

Engineering & Materials Science