Effect of CVD-coated diamond discs on pad surface micro-texture and polish performance in copper CMP

Calliandra Stuffle, Ruochen Han, Yasa Sampurno, David Slutz, Siannie Theng, Leonard Borucki, Ara Philipossian

Research output: Contribution to journalArticle

13 Scopus citations

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Chemical Compounds

Engineering & Materials Science