Effect of interfacial and bulk organic contamination on the quality of thin silicon oxide

Physics & Astronomy

• silicon oxides 72%
• contamination 61%
• ramps 53%
• wafers 51%
• oxides 43%
• defects 10%
• integrity 10%
• silicon dioxide 7%
• atomic force microscopy 7%
• degradation 7%
• carbon 6%
• oxygen 5%
• characterization 5%
• silicon 5%

Engineering & Materials Science

• Silicon oxides 100%
• Contamination 67%
• Oxides 59%
• Defect density 14%
• Atomic force microscopy 12%
• Characterization (materials science) 8%
• Oxygen 7%
• Silicon 7%
• Carbon 7%
• Defects 6%

Chemical Compounds

• Silicon Oxide 85%
• Tunneling 10%
• Atomic Force Microscopy 7%
• Surface 6%